{
  "date" : "1983-11-11",
  "identifier_doecontract" : "",
  "subject" : "14 SOLAR ENERGY; 36 MATERIALS SCIENCE; SILICON; ANTIREFLECTION COATINGS; SOLAR CELLS; FABRICATION; TITANIUM OXIDES; CHEMICAL VAPOR DEPOSITION; ELECTRICAL PROPERTIES; EXPERIMENTAL DATA; MEDIUM TEMPERATURE; REFRACTIVITY; THICKNESS; THIN FILMS; CHALCOGENIDES; CHEMICAL COATING; COATINGS; DATA; DEPOSITION; DIMENSIONS; DIRECT ENERGY CONVERTERS; ELEMENTS; EQUIPMENT; FILMS; INFORMATION; NUMERICAL DATA; OPTICAL PROPERTIES; OXIDES; OXYGEN COMPOUNDS; PHOTOELECTRIC CELLS; PHOTOVOLTAIC CELLS; PHYSICAL PROPERTIES; SEMIMETALS; SOLAR EQUIPMENT; SURFACE COATING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; 140501* - Solar Energy Conversion- Photovoltaic Conversion; 360601 - Other Materials- Preparation & Manufacture",
  "description" : "Thin films of TiO/sub 2/ were produced at 130-250/sup 0/C by chemical vapour deposition (CVD) involving the hydrolysis of TiCl/sub 4/. An apparatus was developed which gives good control and reproducibility. The reaction takes place on a heated disc that rotates the silicon substrate. Premature reaction between the gases, TiCl/sub 4/ and water vapour is prevented by appropriate temperature control and careful design of the gas delivery system. With this apparatus the thickness of the TiO/sub 2/ films is controlled to within +-5% of the target value. Attention is also directed to reducing the pinhole density of the resulting films. The refractive index of the TiO/sub 2/ films was found to increase with increasing deposition temperature, from 2.1 at around 130/sup 0/C to 2.4 at 250/sup 0/C. From capacitance-voltage measurements the surface charge at the TiO/sub 2/-Si interface of films deposited at 200/sup 0/C was found to be negative. Hence these TiO/sub 2/ films are good antireflection coatings for n-type metal/insulator/semiconductor inversion layer solar cells.",
  "language" : "English",
  "identifier_report" : "",
  "publisher_sponsor" : "",
  "publisher_country" : "Switzerland",
  "source" : "EDB-84-090557",
  "purl" : "",
  "title" : "Simple chemical vapour deposition method for depositing thin TiO/sub 2/ films",
  "type" : "Journal Article",
  "subject_related" : "",
  "relation" : "Journal Name: Thin Solid Films; (Switzerland); Journal Volume: 109:2",
  "entry_date" : "2010-05-18",
  "subject_list" : [ "14 SOLAR ENERGY", "36 MATERIALS SCIENCE", "SILICON", "ANTIREFLECTION COATINGS", "SOLAR CELLS", "FABRICATION", "TITANIUM OXIDES", "CHEMICAL VAPOR DEPOSITION", "ELECTRICAL PROPERTIES", "EXPERIMENTAL DATA", "MEDIUM TEMPERATURE", "REFRACTIVITY", "THICKNESS", "THIN FILMS", "CHALCOGENIDES", "CHEMICAL COATING", "COATINGS", "DATA", "DEPOSITION", "DIMENSIONS", "DIRECT ENERGY CONVERTERS", "ELEMENTS", "EQUIPMENT", "FILMS", "INFORMATION", "NUMERICAL DATA", "OPTICAL PROPERTIES", "OXIDES", "OXYGEN COMPOUNDS", "PHOTOELECTRIC CELLS", "PHOTOVOLTAIC CELLS", "PHYSICAL PROPERTIES", "SEMIMETALS", "SOLAR EQUIPMENT", "SURFACE COATING", "TITANIUM COMPOUNDS", "TRANSITION ELEMENT COMPOUNDS", "140501* - Solar Energy Conversion- Photovoltaic Conversion", "360601 - Other Materials- Preparation & Manufacture" ],
  "publisher_availability" : "",
  "rights" : "",
  "announced_date" : "1984-04-01",
  "type_qualifier" : "",
  "has_fulltext" : false,
  "coverage" : "",
  "identifier" : "",
  "journal_volume" : "109:2",
  "creator" : "Yeung, K S; Lam, Y W",
  "site_ownership_code" : "HEDB",
  "osti_id" : "6907089",
  "journal_issue" : "",
  "resource_type" : "JOUR",
  "format" : "Medium: X; Size: Pages: 169-178",
  "journal_name" : [ ],
  "contributing_organizations" : "",
  "citation_location" : "https://www.osti.gov/etdeweb/biblio/6907089",
  "publication_year" : 1983,
  "subject_list_commas" : "14 SOLAR ENERGY, 36 MATERIALS SCIENCE, SILICON, ANTIREFLECTION COATINGS, SOLAR CELLS, FABRICATION, TITANIUM OXIDES, CHEMICAL VAPOR DEPOSITION, ELECTRICAL PROPERTIES, EXPERIMENTAL DATA, MEDIUM TEMPERATURE, REFRACTIVITY, THICKNESS, THIN FILMS, CHALCOGENIDES, CHEMICAL COATING, COATINGS, DATA, DEPOSITION, DIMENSIONS, DIRECT ENERGY CONVERTERS, ELEMENTS, EQUIPMENT, FILMS, INFORMATION, NUMERICAL DATA, OPTICAL PROPERTIES, OXIDES, OXYGEN COMPOUNDS, PHOTOELECTRIC CELLS, PHOTOVOLTAIC CELLS, PHYSICAL PROPERTIES, SEMIMETALS, SOLAR EQUIPMENT, SURFACE COATING, TITANIUM COMPOUNDS, TRANSITION ELEMENT COMPOUNDS, 140501* - Solar Energy Conversion- Photovoltaic Conversion, 360601 - Other Materials- Preparation & Manufacture",
  "publisher" : "",
  "identifier_other" : "Journal ID: CODEN: THSFA",
  "publisher_research" : "",
  "creators_list" : [ "Yeung, K S", "Lam, Y W" ],
  "doi" : "https://doi.org/10.1016/0040-6090(83)90136-0"
}