{
  "date" : "1991-07-01",
  "identifier_doecontract" : "",
  "subject" : "36 MATERIALS SCIENCE; TITANIUM BORIDES; AUGER ELECTRON SPECTROSCOPY; THIN FILMS; X-RAY DIFFRACTION; COATINGS; ELECTRIC CONDUCTIVITY; ELECTRIC POTENTIAL; ELECTRON DIFFRACTION; SCANNING ELECTRON MICROSCOPY; SPUTTERING; TEMPERATURE DEPENDENCE; BORIDES; BORON COMPOUNDS; COHERENT SCATTERING; DIFFRACTION; ELECTRICAL PROPERTIES; ELECTRON MICROSCOPY; ELECTRON SPECTROSCOPY; FILMS; MICROSCOPY; PHYSICAL PROPERTIES; SCATTERING; SPECTROSCOPY; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; 360201* - Ceramics, Cermets, & Refractories- Preparation & Fabrication; 360202 - Ceramics, Cermets, & Refractories- Structure & Phase Studies",
  "description" : "The bias voltage can be a very important parameter in r.f. sputtering, Auger electron spectroscopy (AES) and X-ray diffraction (XRD) were used to investigate the influence of this parameter on TiB{sub 2} hard coatings. As a result of the AES measurements the boron-to-titanium ratio depends on the bias voltage. With XRD, significant differences in the various coatings can be observed. (orig.).",
  "language" : "English",
  "identifier_report" : "CONF-900933-",
  "publisher_sponsor" : "",
  "publisher_country" : "Switzerland",
  "source" : "CHF-91-0F1494; EDB-92-003739",
  "purl" : "",
  "title" : "Analysis of r. f. -sputtered TiB sub 2 hard coatings by means of X-ray diffractometry and Auger electron spectroscopy",
  "type" : "Conference",
  "subject_related" : "",
  "relation" : "Journal Name: Materials Science and Engineering. A, Structural Materials: Properties, Microstructure and Processing; (Switzerland); Journal Volume: 139:1/2; Conference: 2. international conference on plasma surface engineering, Garmisch-Partenkirchen (Germany), 10-14 Sep 1990",
  "entry_date" : "2010-05-13",
  "subject_list" : [ "36 MATERIALS SCIENCE", "TITANIUM BORIDES", "AUGER ELECTRON SPECTROSCOPY", "THIN FILMS", "X-RAY DIFFRACTION", "COATINGS", "ELECTRIC CONDUCTIVITY", "ELECTRIC POTENTIAL", "ELECTRON DIFFRACTION", "SCANNING ELECTRON MICROSCOPY", "SPUTTERING", "TEMPERATURE DEPENDENCE", "BORIDES", "BORON COMPOUNDS", "COHERENT SCATTERING", "DIFFRACTION", "ELECTRICAL PROPERTIES", "ELECTRON MICROSCOPY", "ELECTRON SPECTROSCOPY", "FILMS", "MICROSCOPY", "PHYSICAL PROPERTIES", "SCATTERING", "SPECTROSCOPY", "TITANIUM COMPOUNDS", "TRANSITION ELEMENT COMPOUNDS", "360201* - Ceramics, Cermets, & Refractories- Preparation & Fabrication", "360202 - Ceramics, Cermets, & Refractories- Structure & Phase Studies" ],
  "publisher_availability" : "",
  "rights" : "",
  "announced_date" : "1992-01-01",
  "type_qualifier" : "Journal Article",
  "has_fulltext" : false,
  "coverage" : "",
  "identifier" : "",
  "journal_volume" : "139:1/2",
  "creator" : "Lohmann, R; Oesterschulze, E; Thoma, K; Gaertner, H [Fachbereich Physik, Gesamthochschule Kassel (Germany)]; Herr, W; Matthes, B; Broszeit, E; Kloos, K H [Inst. fuer Werkstoffkunde, Technische Hochschule Darmstadt (Germany)]",
  "site_ownership_code" : "HEDB",
  "osti_id" : "6224824",
  "journal_issue" : "",
  "resource_type" : "CONF",
  "format" : "Medium: X; Size: Pages: 259-263",
  "journal_name" : [ ],
  "contributing_organizations" : "",
  "citation_location" : "https://www.osti.gov/etdeweb/biblio/6224824",
  "publication_year" : 1991,
  "subject_list_commas" : "36 MATERIALS SCIENCE, TITANIUM BORIDES, AUGER ELECTRON SPECTROSCOPY, THIN FILMS, X-RAY DIFFRACTION, COATINGS, ELECTRIC CONDUCTIVITY, ELECTRIC POTENTIAL, ELECTRON DIFFRACTION, SCANNING ELECTRON MICROSCOPY, SPUTTERING, TEMPERATURE DEPENDENCE, BORIDES, BORON COMPOUNDS, COHERENT SCATTERING, DIFFRACTION, ELECTRICAL PROPERTIES, ELECTRON MICROSCOPY, ELECTRON SPECTROSCOPY, FILMS, MICROSCOPY, PHYSICAL PROPERTIES, SCATTERING, SPECTROSCOPY, TITANIUM COMPOUNDS, TRANSITION ELEMENT COMPOUNDS, 360201* - Ceramics, Cermets, & Refractories- Preparation & Fabrication, 360202 - Ceramics, Cermets, & Refractories- Structure & Phase Studies",
  "publisher" : "",
  "identifier_other" : "Journal ID: ISSN 0921-5093; CODEN: MSAPE",
  "publisher_research" : "",
  "creators_list" : [ "Lohmann, R", "Oesterschulze, E", "Thoma, K", "Gaertner, H [Fachbereich Physik, Gesamthochschule Kassel (Germany)]", "Herr, W", "Matthes, B", "Broszeit, E", "Kloos, K H [Inst. fuer Werkstoffkunde, Technische Hochschule Darmstadt (Germany)]" ],
  "doi" : "https://doi.org/10.1016/0921-5093(91)90626-X"
}