Direct plasma beam deposition of TiN[sub x] layers with an r. f. plasma beam source Weber, F R [Technische Physik und Schwerpunkt Materialwissenschaften, Univ. Kaiserslautern (Germany)]; Oechsner, H [Technische Physik und Schwerpunkt Materialwissenschaften, Univ. Kaiserslautern (Germany)] 36 MATERIALS SCIENCE; FILMS; TEXTURE; TITANIUM NITRIDES; SPUTTERING; ARGON; CHEMICAL COMPOSITION; ELECTRIC CONDUCTIVITY; GRAIN ORIENTATION; GRAIN SIZE; ION BEAMS; MASS SPECTROSCOPY; PLASMA; BEAMS; ELECTRICAL PROPERTIES; ELEMENTS; FLUIDS; GASES; MICROSTRUCTURE; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; ORIENTATION; PHYSICAL PROPERTIES; PNICTIDES; RARE GASES; SIZE; SPECTROSCOPY; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; 360201* - Ceramics, Cermets, & Refractories- Preparation & Fabrication An r.f. plasma beam source which was modified for the production of monoenergetic mixed gas-metal plasma beams has been used for the direct beam deposition of TiN[sub x] layers. Ti was sputter injected into the source plasma maintained in different N[sub 2]-Ar gas mixtures. The energy E[sub ion] of the ion component in the electrically neutral plasma beam was varied between 30 and 200 eV. A strong influence of the nitrogen fraction in the working gas was found on both the growth rate and the composition of the TiN[sub x] layers with x varying from 1 to 1.8. Structural analysis with grazing-incidence X-ray diffraction revealed an average grain size of 160 A and a transition from a random crystallite orientation at E[sub ion] = 30 eV to a strong (111) fibre texture for E[sub ion] above 130 eV. (orig.) Switzerland 1993-10-01 English Conference Journal Article Journal Name: Surface and Coatings Technology; (Switzerland); Journal Volume: 59:1-3; Conference: 3. international conference on plasma surface engineering, Garmisch-Partenkirchen (Germany), 25-29 Oct 1992 Medium: X; Size: Pages: 234-238 https://doi.org/ [] 59:1-3 CONF-921044- Journal ID: ISSN 0257-8972; CODEN: SCTEEJ CHF; CHF-94-0G1923; EDB-94-037238 2008-02-06 5507751