{
  "date" : "1993-10-01",
  "identifier_doecontract" : "",
  "subject" : "36 MATERIALS SCIENCE; FILMS; TEXTURE; TITANIUM NITRIDES; SPUTTERING; ARGON; CHEMICAL COMPOSITION; ELECTRIC CONDUCTIVITY; GRAIN ORIENTATION; GRAIN SIZE; ION BEAMS; MASS SPECTROSCOPY; PLASMA; BEAMS; ELECTRICAL PROPERTIES; ELEMENTS; FLUIDS; GASES; MICROSTRUCTURE; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; ORIENTATION; PHYSICAL PROPERTIES; PNICTIDES; RARE GASES; SIZE; SPECTROSCOPY; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; 360201* - Ceramics, Cermets, & Refractories- Preparation & Fabrication",
  "description" : "An r.f. plasma beam source which was modified for the production of monoenergetic mixed gas-metal plasma beams has been used for the direct beam deposition of TiN[sub x] layers. Ti was sputter injected into the source plasma maintained in different N[sub 2]-Ar gas mixtures. The energy E[sub ion] of the ion component in the electrically neutral plasma beam was varied between 30 and 200 eV. A strong influence of the nitrogen fraction in the working gas was found on both the growth rate and the composition of the TiN[sub x] layers with x varying from 1 to 1.8. Structural analysis with grazing-incidence X-ray diffraction revealed an average grain size of 160 A and a transition from a random crystallite orientation at E[sub ion] = 30 eV to a strong (111) fibre texture for E[sub ion] above 130 eV. (orig.)",
  "language" : "English",
  "identifier_report" : "CONF-921044-",
  "publisher_sponsor" : "",
  "publisher_country" : "Switzerland",
  "source" : "CHF; CHF-94-0G1923; EDB-94-037238",
  "purl" : "",
  "title" : "Direct plasma beam deposition of TiN[sub x] layers with an r. f. plasma beam source",
  "type" : "Conference",
  "subject_related" : "",
  "relation" : "Journal Name: Surface and Coatings Technology; (Switzerland); Journal Volume: 59:1-3; Conference: 3. international conference on plasma surface engineering, Garmisch-Partenkirchen (Germany), 25-29 Oct 1992",
  "entry_date" : "2008-02-06",
  "subject_list" : [ "36 MATERIALS SCIENCE", "FILMS", "TEXTURE", "TITANIUM NITRIDES", "SPUTTERING", "ARGON", "CHEMICAL COMPOSITION", "ELECTRIC CONDUCTIVITY", "GRAIN ORIENTATION", "GRAIN SIZE", "ION BEAMS", "MASS SPECTROSCOPY", "PLASMA", "BEAMS", "ELECTRICAL PROPERTIES", "ELEMENTS", "FLUIDS", "GASES", "MICROSTRUCTURE", "NITRIDES", "NITROGEN COMPOUNDS", "NONMETALS", "ORIENTATION", "PHYSICAL PROPERTIES", "PNICTIDES", "RARE GASES", "SIZE", "SPECTROSCOPY", "TITANIUM COMPOUNDS", "TRANSITION ELEMENT COMPOUNDS", "360201* - Ceramics, Cermets, & Refractories- Preparation & Fabrication" ],
  "publisher_availability" : "",
  "rights" : "",
  "announced_date" : "2001-05-13",
  "type_qualifier" : "Journal Article",
  "has_fulltext" : false,
  "coverage" : "",
  "identifier" : "",
  "journal_volume" : "59:1-3",
  "creator" : "Weber, F R [Technische Physik und Schwerpunkt Materialwissenschaften, Univ. Kaiserslautern (Germany)]; Oechsner, H [Technische Physik und Schwerpunkt Materialwissenschaften, Univ. Kaiserslautern (Germany)]",
  "site_ownership_code" : "CHF",
  "osti_id" : "5507751",
  "journal_issue" : "",
  "resource_type" : "CONF",
  "format" : "Medium: X; Size: Pages: 234-238",
  "journal_name" : [ ],
  "contributing_organizations" : "",
  "citation_location" : "https://www.osti.gov/etdeweb/biblio/5507751",
  "publication_year" : 1993,
  "subject_list_commas" : "36 MATERIALS SCIENCE, FILMS, TEXTURE, TITANIUM NITRIDES, SPUTTERING, ARGON, CHEMICAL COMPOSITION, ELECTRIC CONDUCTIVITY, GRAIN ORIENTATION, GRAIN SIZE, ION BEAMS, MASS SPECTROSCOPY, PLASMA, BEAMS, ELECTRICAL PROPERTIES, ELEMENTS, FLUIDS, GASES, MICROSTRUCTURE, NITRIDES, NITROGEN COMPOUNDS, NONMETALS, ORIENTATION, PHYSICAL PROPERTIES, PNICTIDES, RARE GASES, SIZE, SPECTROSCOPY, TITANIUM COMPOUNDS, TRANSITION ELEMENT COMPOUNDS, 360201* - Ceramics, Cermets, & Refractories- Preparation & Fabrication",
  "publisher" : "",
  "identifier_other" : "Journal ID: ISSN 0257-8972; CODEN: SCTEEJ",
  "publisher_research" : "",
  "creators_list" : [ "Weber, F R [Technische Physik und Schwerpunkt Materialwissenschaften, Univ. Kaiserslautern (Germany)]", "Oechsner, H [Technische Physik und Schwerpunkt Materialwissenschaften, Univ. Kaiserslautern (Germany)]" ],
  "doi" : "https://doi.org/"
}