{
  "date" : "1998-12-31",
  "identifier_doecontract" : "",
  "subject" : "70 PLASMA PHYSICS AND FUSION; AMMONIA; DISSOCIATION; EMISSION SPECTROSCOPY; EXCITATION; GAS LASERS; PLASMA; PLATES; REACTIVITY; SILANES",
  "description" : "The elaboration of the {beta}-Si{sub 3}N{sub 4} phase by plasma enhanced chemical vapour deposition is obtained using a radio frequency parallel plate discharge in a SiH{sub 4} - NH{sub 3} mixture. Our interest was focused on a systematic analysis of NH{sub 3} and SiH{sub 4}-NH{sub 3} plasmas in order to establish the nitrogenated species reactivity in the silane presence. Optical Emission Spectroscopy measurements have permitted to study the ammonia dissociation products in two different reactors (capacitive and mixte excitation systems). For the same experimental conditions (pressure, electric power) the ratios of the emission intensities associated to NH(A) and NH{sub 2}(A) states seem to be strongly affected by the excitation mode. Laser Induced Fluorescence method was used to analyse the destruction processes of NH{sub 2}(A) state and to identify the partners nature in inelastic collisions. No resonance signal was detected and the induced signal was associated at NH(A) state. All signal disappears in silane presence and these results suggest the high reactivity of the NH{sub x} radicals. The influence of the experimental conditions in the creation of NH{sub 2} radicals was also pointed out by Optical Absorption Spectroscopy. (authors) 8 refs.; 8 figs.; 2 tabs.",
  "language" : "English",
  "identifier_report" : "",
  "publisher_sponsor" : "Comenius University, Faculty of Mathematics and Physics, Mlynska dolina F-1, 842 15 Bratislava (Slovakia)",
  "publisher_country" : "Slovakia",
  "source" : "INIS; SCA: 700300; PA: AIX-30:017458; EDB-99:048014; SN: 99002085816",
  "purl" : "",
  "title" : "Reaction processes in SiH{sub 4}-NH{sub 3} mixture used for a: SiH(N) deposition by plasma enhanced chemical vapour deposition",
  "type" : "Book",
  "subject_related" : "",
  "relation" : "Other Information: DN: 8 refs.; 8 figs.; 2 tabs.; PBD: 1997; Related Information: Is Part Of Physics Letters Comenius University; Peter Lukac [ed.] [Comenius University, Fakulty of Mathematics and Physics, Mlynska dolina F-1, 842 15 Bratislava (Slovakia)]; PB: 119 p.; Acta Physica Universitatis Comenianae; Acta Physica Universitatis Comenianae, v. 381,2",
  "entry_date" : "2008-02-04",
  "subject_list" : [ "70 PLASMA PHYSICS AND FUSION", "AMMONIA", "DISSOCIATION", "EMISSION SPECTROSCOPY", "EXCITATION", "GAS LASERS", "PLASMA", "PLATES", "REACTIVITY", "SILANES" ],
  "publisher_availability" : "Availability from the Library, Faculty of Mathematics and Physics, Comenius University, Mlynska dolina, SK-842 15 Bratislava, Slovak Republic",
  "rights" : "",
  "announced_date" : "2004-01-25",
  "type_qualifier" : "",
  "has_fulltext" : false,
  "coverage" : "",
  "identifier" : "ISBN 80-223-1170-7",
  "journal_volume" : "",
  "creator" : "Ion, L; Marty-Dessus, D; Held, B; Monge, C [Laboratoire d`Electronique des Gaz et des Plasmas, Universite de Pau, Pau, 64000 (France)]",
  "site_ownership_code" : "INIS",
  "osti_id" : "335849",
  "journal_issue" : "",
  "resource_type" : "BOOK",
  "format" : "Medium: X; Size: pp. 43-51",
  "journal_name" : [ ],
  "contributing_organizations" : "",
  "citation_location" : "https://www.osti.gov/etdeweb/biblio/335849",
  "publication_year" : 1997,
  "subject_list_commas" : "70 PLASMA PHYSICS AND FUSION, AMMONIA, DISSOCIATION, EMISSION SPECTROSCOPY, EXCITATION, GAS LASERS, PLASMA, PLATES, REACTIVITY, SILANES",
  "publisher" : "Comenius University Press Bratislava, Bratislava (Slovakia)",
  "identifier_other" : "Other: ISBN 80-223-1170-7; TRN: SK9800148017458",
  "publisher_research" : "This works were supported by the Conseil Regional d`Aquitaine (France)",
  "creators_list" : [ "Ion, L", "Marty-Dessus, D", "Held, B", "Monge, C [Laboratoire d`Electronique des Gaz et des Plasmas, Universite de Pau, Pau, 64000 (France)]" ],
  "doi" : "https://doi.org/"
}