{
  "date" : "1999-03-25",
  "identifier_doecontract" : "",
  "subject" : "36 MATERIALS SCIENCE; LIGHT TRANSMISSION; ADHESION; ZINC COMPOUNDS; GALLIUM; VISIBLE SPECTRA; FILMS; ELECTRIC CONDUCTIVITY; SEMICONDUCTOR MATERIALS; LAYERS; EPITAXY; DOPED MATERIALS",
  "description" : "Highly transparent (T>80%) and conductive ({rho}{proportional_to}10{sup -3}{Omega} cm) zinc oxide thin films were deposited by atomic layer-controlled growth on a wide variety of substrates, including glass sapphire and flexible polyethylene terephthalate (PET) at temperatures of 100-210 C using diethylzinc (DEtZn) and water. This is the first example of atomic layer-controlled growth or atomic layer epitaxy on a polymer substrate. The growth was accomplished by separating the CVD reaction, Zn(CH{sub 2}CH{sub 3}){sub 2}+H{sub 2}O{yields}ZnO+2CH{sub 3}CH{sub 3}, into the following half reactions: (A) Zn-OH{sup *}+Zn(CH{sub 2}CH{sub 3}){sub 2}{yields}Zn-O-Zn-CH{sub 2}CH{sub 3}{sup *}+CH{sub 3}CH{sub 3} (B) Zn-CH{sub 2}CH{sub 3}{sup *}+H{sub 2}O{yields}Zn-OH{sup *}+CH{sub 3}CH{sub 3}.The reactions were self-terminating and growth rates from 1.5-1.9 A/cycle were observed. In order to grow films at higher temperatures and to improve film adhesion, alumina buffer layers were deposited before the ZnO films on PET substrates. The resistivity of the films improved by doping gallium into the films and with increasing temperature. The best film grown on PET had a resistivity of 1.4 x 10{sup -3}{Omega} cm, while the best film grown on glass had a resistivity of 8 x 10{sup -4}{Omega} cm. (orig.) 24 refs.",
  "language" : "English",
  "identifier_report" : "",
  "publisher_sponsor" : "",
  "publisher_country" : "Switzerland",
  "source" : "CHF; SCA: 360606; PA: CHF-99:0G4877; EDB-99:046361; SN: 99002084267",
  "purl" : "",
  "title" : "Atomic layer-controlled growth of transparent conducting ZnO on plastic substrates",
  "type" : "Journal Article",
  "subject_related" : "",
  "relation" : "Journal Name: Materials Chemistry and Physics; Journal Volume: 58; Journal Issue: 2; Other Information: PBD: 25 Mar 1999",
  "entry_date" : "2010-12-29",
  "subject_list" : [ "36 MATERIALS SCIENCE", "LIGHT TRANSMISSION", "ADHESION", "ZINC COMPOUNDS", "GALLIUM", "VISIBLE SPECTRA", "FILMS", "ELECTRIC CONDUCTIVITY", "SEMICONDUCTOR MATERIALS", "LAYERS", "EPITAXY", "DOPED MATERIALS" ],
  "publisher_availability" : "",
  "rights" : "",
  "announced_date" : "1999-05-05",
  "type_qualifier" : "",
  "has_fulltext" : false,
  "coverage" : "",
  "identifier" : "",
  "journal_volume" : "58",
  "creator" : "Ott, A W; Chang, R P.H. [Northwestern Univ., Evanston, IL (United States). Materials Research Center]",
  "site_ownership_code" : "CHF",
  "osti_id" : "333159",
  "journal_issue" : "2",
  "resource_type" : "JOUR",
  "format" : "Medium: X; Size: pp. 132-138",
  "journal_name" : [ ],
  "contributing_organizations" : "",
  "citation_location" : "https://www.osti.gov/etdeweb/biblio/333159",
  "publication_year" : 1999,
  "subject_list_commas" : "36 MATERIALS SCIENCE, LIGHT TRANSMISSION, ADHESION, ZINC COMPOUNDS, GALLIUM, VISIBLE SPECTRA, FILMS, ELECTRIC CONDUCTIVITY, SEMICONDUCTOR MATERIALS, LAYERS, EPITAXY, DOPED MATERIALS",
  "publisher" : "",
  "identifier_other" : "Journal ID: MCHPDR; ISSN 0254-0584; TRN: CH99G4877",
  "publisher_research" : "",
  "creators_list" : [ "Ott, A W", "Chang, R P.H. [Northwestern Univ., Evanston, IL (United States). Materials Research Center]" ],
  "doi" : "https://doi.org/10.1016/S0254-0584(98)00264-8"
}