A novel sputtering oxidation coupling (SOC) method to fabricate VO{sub 2} thin film Xu Xiaofeng, E-mail: xxf61@163.com [Department of Applied Physics, Donghua University, Shanghai 201620 (China)]; Anyuan, Yin [Department of Chemistry and Shanghai Key Laboratory of Molecular Catalysis and Innovative Materials, Fudan University, Shanghai 200433 (China)]; Xiliang, Du [Electronic Engineering Institute, Hei Longjiang University, Harbin 150080 (China)]; Wang Jiqing, E-mail: jqwang@ee.ecnu.edu.cn [Key Laboratory of Polarized Materials and Devices, East China Normal University, Shanghai 200062 (China)]; Jiading, Liu; Xinfeng, He; Xingxing, Liu [Department of Applied Physics, Donghua University, Shanghai 201620 (China)]; Yilong, Huan [College of Textiles, Donghua University, Shanghai 201620 (China)] 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; COUPLING; METALS; OXIDATION; SURFACES; TEMPERATURE RANGE 0273-0400 K; THIN FILMS; VANADIUM OXIDES; X-RAY DIFFRACTOMETERS; X-RAY PHOTOELECTRON SPECTROSCOPY VO{sub 2} thin film synthesized by a novel sputtering oxidation coupling (SOC) method has been successfully fabricated. The experimental results show that the optimum oxidation time is 285 s and the thin film exhibits a good metal-insulator transition (MIT) approximately at 340 K. The corresponding structures and surface compositions of the films have been characterized by X-ray diffractometer and X-ray photoelectron spectroscopy separately. Available from http://dx.doi.org/10.1016/j.apsusc.2009.11.022 Netherlands 2010-02-15 English Journal Article Journal Name: Applied Surface Science; Journal Volume: 256; Journal Issue: 9; Other Information: Copyright (c) 2009 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: International Atomic Energy Agency (IAEA) Medium: X; Size: page(s) 2750-2753 https://doi.org/10.1016/J.APSUSC.2009.11.022 PII: S0169-4332(09)01611-0 [] 9 256 Journal ID: ISSN 0169-4332; CODEN: ASUSEE; Other: PII: S0169-4332(09)01611-0; TRN: NL10R0820018531 NLN 2013-04-12 22058049