Optical emission spectroscopy characterization of oxygen plasma during treatment of a PET foil Krstulovic, N [Institute of Physics, Bijenicka 46, 10000 Zagreb (Croatia)]; Labazan, I [Institute of Physics, Bijenicka 46, 10000 Zagreb (Croatia)]; Milosevic, S [Institute of Physics, Bijenicka 46, 10000 Zagreb (Croatia)]; Cvelbar, U [Institute Jozef Stefan, Jamova 39, 1000 Ljubljana (Slovenia)]; Vesel, A [Institute Jozef Stefan, Jamova 39, 1000 Ljubljana (Slovenia)]; Mozetic, M [Institute Jozef Stefan, Jamova 39, 1000 Ljubljana (Slovenia)] 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; CARBON MONOXIDE; CARRIER DENSITY; CHARGED PARTICLES; ELECTRON TEMPERATURE; EMISSION; EMISSION SPECTROSCOPY; EVOLUTION; OPTICAL SPECTROMETERS; OXIDATION; OXYGEN; PLASMA; POLYESTERS; RADICALS Optical emission spectroscopy (OES) analysis of inductively coupled RF oxygen plasma during plasma treatment of a 23 {mu}m thick polyethylene terephthalate (PET) foil is presented. Plasma was generated in pure oxygen at a pressure of 75 Pa with a RF generator at a frequency of 27.12 MHz and an output power of 300 W. The electron temperature was about 6 eV, the density of charged particles about 10{sup 16} m{sup -3} and the density of neutral O atoms about 10{sup 22} m{sup -3}. Spectra were measured in the range from 250 to 950 nm by means of an optical spectrometer. For the first 10 s of plasma treatment the OES showed the presence of oxygen radicals only. Later, the OES spectra became richer with significant emission from CO and OH, which was attributed to PET oxidation. Simultaneously, the O peaks decreased significantly. After prolonged plasma treatment, the O peaks recovered, the CO band vanished while the OH and H peaks still persisted. In the final period of the treatment only atomic oxygen lines remained. The results showed that OES analysis was a powerful method for studying the evolution of PET oxidation by plasma treatment. Available online at http://stacks.iop.org/0022-3727/39/3799/d6_17_014.pdf or at the Web site for the Journal of Physics. D, Applied Physics (ISSN 1361-6463) http://www.iop.org/;INIS United Kingdom 2006-09-07 English Journal Article Journal Name: Journal of Physics. D, Applied Physics; Journal Volume: 39; Journal Issue: 17; Other Information: PII: S0022-3727(06)20101-3; DOI: 10.1088/0022-3727/39/17/014; Country of input: International Atomic Energy Agency (IAEA) Medium: X; Size: page(s) 3799-3804 https://doi.org/10.1088/0022-3727/39/17/014; COUNTRY OF INPUT: INTERNATIONAL ATOMIC ENERGY AGENCY (IAEA) [] 17 39 Journal ID: ISSN 0022-3727; JPAPBE; TRN: GB06P8094000697 GBN 2010-12-31 20825289