TY - THES TI - Production and study of mixed Al-Al{sub 2}O{sub 3} thin films for passive electronic circuits; Realisation et etude des couches minces mixtes Al-Al{sub 2}O{sub 3} pour circuits electroniques passifs AB - A new vacuum deposition process, named reactive evaporation, is used to realize passive thin film circuits. Using aluminium, oxidized at various steps in its vapor phase, we obtain: - Al-Al{sub 2}O{sub 3} cermet resistors (R{sub {open_square}} = 10000 {omega}{sub {open_square}}, CTR <{+-} 150 ppm/deg. C) which show oscillations of the resistivity versus the thickness of the layer, in distinction to classical theory. - Al{sub 2}O{sub 3} capacitors (C{sub {open_square}} = 60000 pf/cm{sup 2}, tg {delta} < 0.5 per cent). These thin film components present good electrical behaviour and should find interesting applications in integrated circuits. (author) [French] Une nouvelle technique de depot sous vide, l'evaporation reactive est utilisee pour realiser des circuits passifs en couches minces. En oxydant, en phase vapeur, de l'aluminium a differents degres, on obtient: - des resistances en cermet Al-Al{sub 2}O{sub 3} (R{sub {open_square}} = 10000 {omega}{sub {open_square}}, CTR <{+-} 150 ppm) dont Ia resistivite oscille en fonction de l'epaisseur, contrairement aux previsions de la theorie classique. - Des capacites en Al{sub 2}O{sub 3} (C{sub {open_square}} = 60000 pf/cm{sup 2}, tg {delta} < 0.5 pour cent). Ces elements presentent de bonnes caracteristiques electriques et seraient avantageusement utilises en circuits integres. (auteur) AU - "Pruniaux, B [Commissariat a l'Energie Atomique, 38 - Grenoble (France). Centre d'Etudes Nucleaires]" KW - "75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY" KW - "ACCURACY" KW - "ALUMINIUM" KW - "ALUMINIUM OXIDES" KW - "CAPACITORS" KW - "ELECTRIC CONDUCTIVITY" KW - "TEMPERATURE DEPENDENCE" KW - "THICKNESS" KW - "THIN FILMS" KW - "VACUUM EVAPORATION" DO - https://doi.org/ UR - https://www.osti.gov/etdeweb/servlets/purl/20626208 PB - CY - France PY - 1967 DA - 1967-07-01 LA - French J2 - [] VL - C1 - CEA Grenoble, 38 (France); Faculte des Sciences de l'Universite de Grenoble, 38 (France) C2 - C3 - CEA-R-3120 C4 - C5 - Available from INIS in electronic form L3 - Other Information: TH: These docteur-ingenieur; 88 refs; PBD: 1967 ER -