Microelectromechanical tunable inductor
Abstract
A microelectromechanical tunable inductor is formed from a pair of substantially-identically-sized coils arranged side by side and coiled up about a central axis which is parallel to a supporting substrate. An in-plane stress gradient is responsible for coiling up the coils which. The inductance provided by the tunable inductor can be electrostatically changed either continuously or in discrete steps using electrodes on the substrate and on each coil. The tunable inductor can be formed with processes which are compatible with conventional IC fabrication so that, in some cases, the tunable inductor can be formed on a semiconductor substrate alongside or on top of an IC.
- Inventors:
-
- Norman, OK
- Albuquerque, NM
- (Albuquerque, NM)
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 985228
- Patent Number(s):
- 7710232
- Application Number:
- 11/746,147
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01F - MAGNETS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Stalford, Harold L, Hietala, Vincent M, Fleming, James G, and Fleming, legal representative, Carol. Microelectromechanical tunable inductor. United States: N. p., 2010.
Web.
Stalford, Harold L, Hietala, Vincent M, Fleming, James G, & Fleming, legal representative, Carol. Microelectromechanical tunable inductor. United States.
Stalford, Harold L, Hietala, Vincent M, Fleming, James G, and Fleming, legal representative, Carol. Tue .
"Microelectromechanical tunable inductor". United States. https://www.osti.gov/servlets/purl/985228.
@article{osti_985228,
title = {Microelectromechanical tunable inductor},
author = {Stalford, Harold L and Hietala, Vincent M and Fleming, James G and Fleming, legal representative, Carol},
abstractNote = {A microelectromechanical tunable inductor is formed from a pair of substantially-identically-sized coils arranged side by side and coiled up about a central axis which is parallel to a supporting substrate. An in-plane stress gradient is responsible for coiling up the coils which. The inductance provided by the tunable inductor can be electrostatically changed either continuously or in discrete steps using electrodes on the substrate and on each coil. The tunable inductor can be formed with processes which are compatible with conventional IC fabrication so that, in some cases, the tunable inductor can be formed on a semiconductor substrate alongside or on top of an IC.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 04 00:00:00 EDT 2010},
month = {Tue May 04 00:00:00 EDT 2010}
}
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