Anti-stiction coating for microelectromechanical devices
Abstract
A method for depositing an anti-stiction coating on a MEMS device comprises reacting the vapor of an amino-functionalized silane precursor with a silicon surface of the MEMS device in a vacuum chamber. The method can further comprise cleaning the silicon surface of the MEMS device to form a clean hydroxylated silicon surface prior to reacting the precursor vapor with the silicon surface. The amino-functionalized silane precursor comprises at least one silicon atom, at least one reactive amino (or imine) pendant, and at least one hydrophobic pendant. The amino-functionalized silane precursor is highly reactive with the silicon surface, thereby eliminating the need for a post-process anneal step and enabling the reaction to occur at low pressure. Such vapor-phase deposition of the amino-functionalized silane coating provides a uniform surface morphology and strong adhesion to the silicon surface.
- Inventors:
-
- Albuquerque, NM
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 908432
- Patent Number(s):
- 7045170
- Application Number:
- 10/115,411
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B05 - SPRAYING OR ATOMISING IN GENERAL B05D - PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Hankins, Matthew G, Mayer, Thomas M, and Wheeler, David R. Anti-stiction coating for microelectromechanical devices. United States: N. p., 2006.
Web.
Hankins, Matthew G, Mayer, Thomas M, & Wheeler, David R. Anti-stiction coating for microelectromechanical devices. United States.
Hankins, Matthew G, Mayer, Thomas M, and Wheeler, David R. Tue .
"Anti-stiction coating for microelectromechanical devices". United States. https://www.osti.gov/servlets/purl/908432.
@article{osti_908432,
title = {Anti-stiction coating for microelectromechanical devices},
author = {Hankins, Matthew G and Mayer, Thomas M and Wheeler, David R},
abstractNote = {A method for depositing an anti-stiction coating on a MEMS device comprises reacting the vapor of an amino-functionalized silane precursor with a silicon surface of the MEMS device in a vacuum chamber. The method can further comprise cleaning the silicon surface of the MEMS device to form a clean hydroxylated silicon surface prior to reacting the precursor vapor with the silicon surface. The amino-functionalized silane precursor comprises at least one silicon atom, at least one reactive amino (or imine) pendant, and at least one hydrophobic pendant. The amino-functionalized silane precursor is highly reactive with the silicon surface, thereby eliminating the need for a post-process anneal step and enabling the reaction to occur at low pressure. Such vapor-phase deposition of the amino-functionalized silane coating provides a uniform surface morphology and strong adhesion to the silicon surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 16 00:00:00 EDT 2006},
month = {Tue May 16 00:00:00 EDT 2006}
}
Works referenced in this record:
Chemical vapor deposition of fluoroalkylsilane monolayer films for adhesion control in microelectromechanical systems
journal, January 2000
- Mayer, T. M.; de Boer, M. P.; Shinn, N. D.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 5
The Impact of Solution Agglomeration on the Deposition of Self-Assembled Monolayers
journal, October 2000
- Bunker, B. C.; Carpick, R. W.; Assink, R. A.
- Langmuir, Vol. 16, Issue 20