Spatial light modulator array with heat minimization and image enhancement features
Abstract
An enhanced spatial light modulator (ESLM) array, a microelectronics patterning system and a projection display system using such an ESLM for heat-minimization and resolution enhancement during imaging, and the method for fabricating such an ESLM array. The ESLM array includes, in each individual pixel element, a small pixel mirror (reflective region) and a much larger pixel surround. Each pixel surround includes diffraction-grating regions and resolution-enhancement regions. During imaging, a selected pixel mirror reflects a selected-pixel beamlet into the capture angle of a projection lens, while the diffraction grating of the pixel surround redirects heat-producing unused radiation away from the projection lens. The resolution-enhancement regions of selected pixels provide phase shifts that increase effective modulation-transfer function in imaging. All of the non-selected pixel surrounds redirect all radiation energy away from the projection lens. All elements of the ESLM are fabricated by deposition, patterning, etching and other microelectronic process technologies.
- Inventors:
-
- Briarcliff Manor, NY
- Albuquerque, NM
- New Rochelle, NY
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 902915
- Patent Number(s):
- 7170669
- Application Number:
- 11/237,382
- Assignee:
- Anvik Corporation (Hawthorne, NY); Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Jain, Kanti, Sweatt, William C, and Zemel, Marc. Spatial light modulator array with heat minimization and image enhancement features. United States: N. p., 2007.
Web.
Jain, Kanti, Sweatt, William C, & Zemel, Marc. Spatial light modulator array with heat minimization and image enhancement features. United States.
Jain, Kanti, Sweatt, William C, and Zemel, Marc. Tue .
"Spatial light modulator array with heat minimization and image enhancement features". United States. https://www.osti.gov/servlets/purl/902915.
@article{osti_902915,
title = {Spatial light modulator array with heat minimization and image enhancement features},
author = {Jain, Kanti and Sweatt, William C and Zemel, Marc},
abstractNote = {An enhanced spatial light modulator (ESLM) array, a microelectronics patterning system and a projection display system using such an ESLM for heat-minimization and resolution enhancement during imaging, and the method for fabricating such an ESLM array. The ESLM array includes, in each individual pixel element, a small pixel mirror (reflective region) and a much larger pixel surround. Each pixel surround includes diffraction-grating regions and resolution-enhancement regions. During imaging, a selected pixel mirror reflects a selected-pixel beamlet into the capture angle of a projection lens, while the diffraction grating of the pixel surround redirects heat-producing unused radiation away from the projection lens. The resolution-enhancement regions of selected pixels provide phase shifts that increase effective modulation-transfer function in imaging. All of the non-selected pixel surrounds redirect all radiation energy away from the projection lens. All elements of the ESLM are fabricated by deposition, patterning, etching and other microelectronic process technologies.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 30 00:00:00 EST 2007},
month = {Tue Jan 30 00:00:00 EST 2007}
}