Multi-level scanning method for defect inspection
Abstract
A method for performing scanned defect inspection of a collection of contiguous areas using a specified false-alarm-rate and capture-rate within an inspection system that has characteristic seek times between inspection locations. The multi-stage method involves setting an increased false-alarm-rate for a first stage of scanning, wherein subsequent stages of scanning inspect only the detected areas of probable defects at lowered values for the false-alarm-rate. For scanning inspection operations wherein the seek time and area uncertainty is favorable, the method can substantially increase inspection throughput.
- Inventors:
-
- Oakland, CA
- Richmond, CA
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- OSTI Identifier:
- 874891
- Patent Number(s):
- 6484306
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G06 - COMPUTING G06T - IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- multi-level; scanning; method; defect; inspection; performing; scanned; collection; contiguous; specified; false-alarm-rate; capture-rate; characteristic; seek; times; locations; multi-stage; involves; setting; increased; stage; subsequent; stages; inspect; detected; probable; defects; lowered; values; operations; time; uncertainty; favorable; substantially; increase; throughput; /716/378/382/430/700/
Citation Formats
Bokor, Jeffrey, and Jeong, Seongtae. Multi-level scanning method for defect inspection. United States: N. p., 2002.
Web.
Bokor, Jeffrey, & Jeong, Seongtae. Multi-level scanning method for defect inspection. United States.
Bokor, Jeffrey, and Jeong, Seongtae. Tue .
"Multi-level scanning method for defect inspection". United States. https://www.osti.gov/servlets/purl/874891.
@article{osti_874891,
title = {Multi-level scanning method for defect inspection},
author = {Bokor, Jeffrey and Jeong, Seongtae},
abstractNote = {A method for performing scanned defect inspection of a collection of contiguous areas using a specified false-alarm-rate and capture-rate within an inspection system that has characteristic seek times between inspection locations. The multi-stage method involves setting an increased false-alarm-rate for a first stage of scanning, wherein subsequent stages of scanning inspect only the detected areas of probable defects at lowered values for the false-alarm-rate. For scanning inspection operations wherein the seek time and area uncertainty is favorable, the method can substantially increase inspection throughput.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 01 00:00:00 EST 2002},
month = {Tue Jan 01 00:00:00 EST 2002}
}
Works referenced in this record:
Efficient critical area algorithms and their application to yield improvement and test strategies
conference, January 1994
- Allan, G. A.; Walton, A. J.
- IEEE International Workshop on Defect and Fault Tolerance in VLSI Systems
Modeling of real defect outlines and parameter extraction using a checkerboard test structure to localize defects
journal, January 1994
- Hess, C.; Stroele, A. P.
- IEEE Transactions on Semiconductor Manufacturing, Vol. 7, Issue 3
A rule based inspection for printed circuit boards
conference, January 1990
- Mital, D. P.; Khwang, T. E.
- IEEE TENCON'90: 1990 IEEE Region 10 Conference on Computer and Communication Systems. Conference Proceedings
Use of multiple lithography monitors in a defect control strategy for high volume manufacturing
conference, January 1999
- Bond, L.; Sutton, D.; Turnquest, K.
- 1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings, 10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295)
Estimating component-defect probability from masked system success/failure data
journal, June 1996
- Reiser, B.; Flehinger, B. J.; Conn, A. R.
- IEEE Transactions on Reliability, Vol. 45, Issue 2
Adaptive thresholding-a robust fault detection approach
conference, December 1997
- Le, Ke; Huang, Zhaohui; Moon, Chu Whan
- Proceedings of the 36th IEEE Conference on Decision and Control
Fast multi-layer critical area computation
conference, January 1993
- Xue, H.; Di, C.; Jess, J. A. G.
- Proceedings of 1993 IEEE International Workshop on Defect and Fault Tolerance in VLSI Systems
Automated shadow mask inspection using DSP
conference, August 2002
- Woo, Dong-Min; Park, Mignon
- Proceedings IROS '91:IEEE/RSJ International Workshop on Intelligent Robots and Systems '91
Strategy to disentangle multiple faults to identify random defects within test structures
conference, January 1998
- Hess, C.; Weiland, L. H.
- ICMTS 1998. International Conference on Microelectronic Test Structures, ICMTS 1998. Proceedings of 1998 International Conference on Microelectronic Test Structures (Cat. No.98CH36157)