Apparatus and method for fabricating a microbattery
Abstract
An apparatus and method for fabricating a microbattery that uses silicon as the structural component, packaging component, and semiconductor to reduce the weight, size, and cost of thin film battery technology is described. When combined with advanced semiconductor packaging techniques, such a silicon-based microbattery enables the fabrication of autonomous, highly functional, integrated microsystems having broad applicability.
- Inventors:
-
- Albuquerque, NM
- Edgewood, NM
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 874649
- Patent Number(s):
- 6432577
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01M - PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- apparatus; method; fabricating; microbattery; silicon; structural; component; packaging; semiconductor; reduce; weight; size; cost; film; battery; technology; described; combined; advanced; techniques; silicon-based; enables; fabrication; autonomous; highly; functional; integrated; microsystems; broad; applicability; film battery; structural component; /429/
Citation Formats
Shul, Randy J, Kravitz, Stanley H, Christenson, Todd R, Zipperian, Thomas E, and Ingersoll, David. Apparatus and method for fabricating a microbattery. United States: N. p., 2002.
Web.
Shul, Randy J, Kravitz, Stanley H, Christenson, Todd R, Zipperian, Thomas E, & Ingersoll, David. Apparatus and method for fabricating a microbattery. United States.
Shul, Randy J, Kravitz, Stanley H, Christenson, Todd R, Zipperian, Thomas E, and Ingersoll, David. Tue .
"Apparatus and method for fabricating a microbattery". United States. https://www.osti.gov/servlets/purl/874649.
@article{osti_874649,
title = {Apparatus and method for fabricating a microbattery},
author = {Shul, Randy J and Kravitz, Stanley H and Christenson, Todd R and Zipperian, Thomas E and Ingersoll, David},
abstractNote = {An apparatus and method for fabricating a microbattery that uses silicon as the structural component, packaging component, and semiconductor to reduce the weight, size, and cost of thin film battery technology is described. When combined with advanced semiconductor packaging techniques, such a silicon-based microbattery enables the fabrication of autonomous, highly functional, integrated microsystems having broad applicability.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 01 00:00:00 EST 2002},
month = {Tue Jan 01 00:00:00 EST 2002}
}
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Works referenced in this record:
Rechargeable thin-film lithium batteries
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- Solid State Ionics, Vol. 70-71
Thin-film rechargeable lithium batteries
journal, March 1995
- Bates, J. B.; Dudney, N. J.; Lubben, D. C.
- Journal of Power Sources, Vol. 54, Issue 1, p. 58-62