Temperature determination using pyrometry
Abstract
A method for determining the temperature of a surface upon which a coating is grown using optical pyrometry by correcting Kirchhoff's law for errors in the emissivity or reflectance measurements associated with the growth of the coating and subsequent changes in the surface thermal emission and heat transfer characteristics. By a calibration process that can be carried out in situ in the chamber where the coating process occurs, an error calibration parameter can be determined that allows more precise determination of the temperature of the surface using optical pyrometry systems. The calibration process needs only to be carried out when the physical characteristics of the coating chamber change.
- Inventors:
-
- Albuquerque, NM
- Bridgewater, NJ
- Princeton, NJ
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 874477
- Patent Number(s):
- 6398406
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- temperature; determination; pyrometry; method; determining; surface; coating; grown; optical; correcting; kirchhoffs; law; errors; emissivity; reflectance; measurements; associated; growth; subsequent; changes; thermal; emission; heat; transfer; characteristics; calibration; process; carried; situ; chamber; occurs; error; parameter; determined; allows; precise; systems; physical; change; heat transfer; temperature determination; /374/356/702/
Citation Formats
Breiland, William G, Gurary, Alexander I, and Boguslavskiy, Vadim. Temperature determination using pyrometry. United States: N. p., 2002.
Web.
Breiland, William G, Gurary, Alexander I, & Boguslavskiy, Vadim. Temperature determination using pyrometry. United States.
Breiland, William G, Gurary, Alexander I, and Boguslavskiy, Vadim. Tue .
"Temperature determination using pyrometry". United States. https://www.osti.gov/servlets/purl/874477.
@article{osti_874477,
title = {Temperature determination using pyrometry},
author = {Breiland, William G and Gurary, Alexander I and Boguslavskiy, Vadim},
abstractNote = {A method for determining the temperature of a surface upon which a coating is grown using optical pyrometry by correcting Kirchhoff's law for errors in the emissivity or reflectance measurements associated with the growth of the coating and subsequent changes in the surface thermal emission and heat transfer characteristics. By a calibration process that can be carried out in situ in the chamber where the coating process occurs, an error calibration parameter can be determined that allows more precise determination of the temperature of the surface using optical pyrometry systems. The calibration process needs only to be carried out when the physical characteristics of the coating chamber change.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 01 00:00:00 EST 2002},
month = {Tue Jan 01 00:00:00 EST 2002}
}
Works referenced in this record:
Pyrometric interferometry for real time molecular beam epitaxy process monitoring
journal, March 1994
- Böbel, F. G.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 12, Issue 2