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Title: Fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing

Abstract

Systems and methods are described for fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing. A method of forming a lithium cobalt oxide film includes depositing a film of lithium cobalt oxide on a substrate; rapidly heating the film of lithium cobalt oxide to a target temperature; and maintaining the film of lithium cobalt oxide at the target temperature for a target annealing time of at most, approximately 60 minutes. The systems and methods provide advantages because they require less time to implement and are, therefore less costly than previous techniques.

Inventors:
 [1]
  1. Marietta, GA
Issue Date:
Research Org.:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
OSTI Identifier:
874226
Patent Number(s):
6344366
Assignee:
Lockheed Martin Energy Research Corporation (Oak Ridge, TN)
Patent Classifications (CPCs):
C - CHEMISTRY C01 - INORGANIC CHEMISTRY C01G - COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
C - CHEMISTRY C01 - INORGANIC CHEMISTRY C01P - INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
DOE Contract Number:  
AC05-96OR22464
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
fabrication; highly; textured; lithium; cobalt; oxide; films; rapid; thermal; annealing; systems; methods; described; method; forming; film; depositing; substrate; rapidly; heating; target; temperature; maintaining; time; approximately; 60; minutes; provide; advantages; require; implement; costly; previous; techniques; methods provide; cobalt oxide; thermal annealing; /438/429/

Citation Formats

Bates, John B. Fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing. United States: N. p., 2002. Web.
Bates, John B. Fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing. United States.
Bates, John B. Tue . "Fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing". United States. https://www.osti.gov/servlets/purl/874226.
@article{osti_874226,
title = {Fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing},
author = {Bates, John B},
abstractNote = {Systems and methods are described for fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing. A method of forming a lithium cobalt oxide film includes depositing a film of lithium cobalt oxide on a substrate; rapidly heating the film of lithium cobalt oxide to a target temperature; and maintaining the film of lithium cobalt oxide at the target temperature for a target annealing time of at most, approximately 60 minutes. The systems and methods provide advantages because they require less time to implement and are, therefore less costly than previous techniques.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 01 00:00:00 EST 2002},
month = {Tue Jan 01 00:00:00 EST 2002}
}

Works referenced in this record:

Preferred Orientation of Polycrystalline LiCoO[sub 2] Films
journal, January 2000


Thin-film cathodes for secondary lithium batteries
journal, April 1995


Characterization of sprayed and sputter deposited LiCoO2 thin films for rechargeable microbatteries
journal, December 1996


Characterization of Thin-Film Rechargeable Lithium Batteries with Lithium Cobalt Oxide Cathodes
journal, January 1996