Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film
Abstract
Methods and apparatus for detecting particular frequencies of acoustic vibration utilize a piezoelectrically-tunable beam element having a piezoelectric layer and a stress sensitive layer and means for providing an electrical potential across the piezoelectric layer to controllably change the beam's stiffness and thereby change its resonance frequency. It is then determined from the response of the piezoelectrically-tunable beam element to the acoustical vibration to which the beam element is exposed whether or not a particular frequency or frequencies of acoustic vibration are detected.
- Inventors:
-
- Knoxville, TN
- Oak Ridge, TN
- Issue Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- OSTI Identifier:
- 874196
- Patent Number(s):
- 6336366
- Assignee:
- UT-Battelle, LLC (Oak Ridge, TN)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01H - MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- DOE Contract Number:
- AC05-96OR22464
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- piezoelectrically; tunable; resonance; frequency; beam; utilizing; stress-sensitive; film; methods; apparatus; detecting; frequencies; acoustic; vibration; utilize; piezoelectrically-tunable; element; piezoelectric; layer; stress; sensitive; means; providing; electrical; potential; controllably; change; beams; stiffness; determined; response; acoustical; exposed; detected; resonance frequency; sensitive film; acoustic vibration; /73/310/
Citation Formats
Thundat, Thomas G, and Wachter, Eric A. Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film. United States: N. p., 2002.
Web.
Thundat, Thomas G, & Wachter, Eric A. Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film. United States.
Thundat, Thomas G, and Wachter, Eric A. Tue .
"Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film". United States. https://www.osti.gov/servlets/purl/874196.
@article{osti_874196,
title = {Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film},
author = {Thundat, Thomas G and Wachter, Eric A},
abstractNote = {Methods and apparatus for detecting particular frequencies of acoustic vibration utilize a piezoelectrically-tunable beam element having a piezoelectric layer and a stress sensitive layer and means for providing an electrical potential across the piezoelectric layer to controllably change the beam's stiffness and thereby change its resonance frequency. It is then determined from the response of the piezoelectrically-tunable beam element to the acoustical vibration to which the beam element is exposed whether or not a particular frequency or frequencies of acoustic vibration are detected.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 01 00:00:00 EST 2002},
month = {Tue Jan 01 00:00:00 EST 2002}
}
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Works referenced in this record:
Adsorption‐induced surface stress and its effects on resonance frequency of microcantilevers
journal, April 1995
- Chen, G. Y.; Thundat, T.; Wachter, E. A.
- Journal of Applied Physics, Vol. 77, Issue 8