Low loss composition of BaxSryCa1-x-yTiO3: Ba0.12-0.25Sr0.35-0.47Ca0.32-0.53TiO3

Xiang, Xiao-Dong; Chang, Hauyee; Takeuchi, Ichiro

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Title: Low loss composition of BaxSryCa1-x-yTiO3: Ba0.12-0.25Sr0.35-0.47Ca0.32-0.53TiO3

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Abstract

A dielectric thin-film material for microwave applications, including use as a capacitor, the thin-film comprising a composition of barium strontium calcium and titanium of perovskite type (Ba.sub.x Sr.sub.y Ca.sub.1-x-y)TiO.sub.3. Also provided is a method for making a dielectric thin film of that formula over a wide compositional range through a single deposition process.

Inventors:

Xiang, Xiao-Dong ^[1]; Chang, Hauyee ^[2]; Takeuchi, Ichiro ^[3]

Alameda, CA
Berkeley, CA
Albany, CA

Issue Date:: Mon Jan 01 00:00:00 EST 2001

Research Org.:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

OSTI Identifier:: 873970

Patent Number(s):: 6285049

Assignee:: United States of America as represented by United States Department (Washington, DC)

Patent Classifications (CPCs):: C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C14/088 - {of the type ABO3 with A representing alkali, alkaline earth metal or Pb and B representing a refractory or rare earth metal}
C23C14/5806 - {Thermal treatment}

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L21/02197 - {the material having a perovskite structure, e.g. BaTiO3}
H01L21/02266 - {deposition by physical ablation of a target, e.g. sputtering, reactive sputtering, physical vapour deposition or pulsed laser deposition}
H01L21/31691 - {with perovskite structure}
H01L28/55 - {with a dielectric comprising a perovskite structure material}

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01P - WAVEGUIDES
H01P11/00 - Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type

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DOE Contract Number:: AC03-76SF00098

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: loss; composition; baxsryca1-x-ytio3; ba0; 12-0; 25sr0; 35-0; 47ca0; 32-0; 53tio3; dielectric; thin-film; material; microwave; applications; including; capacitor; comprising; barium; strontium; calcium; titanium; perovskite; type; sr; 1-x-y; provided; method; film; formula; wide; compositional; range; single; deposition; process; deposition process; film comprising; film material; microwave applications; strontium calcium; thin-film material; thin-film comprising; loss composition; barium strontium; dielectric thin-film; /257/438/

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                    Xiang, Xiao-Dong, Chang, Hauyee, and Takeuchi, Ichiro. Low loss composition of BaxSryCa1-x-yTiO3: Ba0.12-0.25Sr0.35-0.47Ca0.32-0.53TiO3.  United States: N. p., 2001. 
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                    Xiang, Xiao-Dong, Chang, Hauyee, & Takeuchi, Ichiro. Low loss composition of BaxSryCa1-x-yTiO3: Ba0.12-0.25Sr0.35-0.47Ca0.32-0.53TiO3.  United States.

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                    Xiang, Xiao-Dong, Chang, Hauyee, and Takeuchi, Ichiro. Mon .  
        "Low loss composition of BaxSryCa1-x-yTiO3: Ba0.12-0.25Sr0.35-0.47Ca0.32-0.53TiO3".  United States.  https://www.osti.gov/servlets/purl/873970.

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@article{osti_873970,

  title        = {Low loss composition of BaxSryCa1-x-yTiO3: Ba0.12-0.25Sr0.35-0.47Ca0.32-0.53TiO3},

  author       = {Xiang, Xiao-Dong and Chang, Hauyee and Takeuchi, Ichiro},

  abstractNote = {A dielectric thin-film material for microwave applications, including use as a capacitor, the thin-film comprising a composition of barium strontium calcium and titanium of perovskite type (Ba.sub.x Sr.sub.y Ca.sub.1-x-y)TiO.sub.3. Also provided is a method for making a dielectric thin film of that formula over a wide compositional range through a single deposition process.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Mon Jan 01 00:00:00 EST 2001},

  month        = {Mon Jan 01 00:00:00 EST 2001}

}

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