Process for producing radiation-induced self-terminating protective coatings on a substrate
Abstract
A gas and radiation are used to produce a protective coating that is substantially void-free on the molecular scale, self-terminating, and degradation resistant. The process can be used to deposit very thin (.apprxeq.5-20 .ANG.) coatings on critical surfaces needing protection from degradative processes including, corrosion and contamination.
- Inventors:
-
- Dublin, CA
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 873733
- Patent Number(s):
- 6231930
- Assignee:
- EUV LLC (Santa Clara, CA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B05 - SPRAYING OR ATOMISING IN GENERAL B05D - PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- process; producing; radiation-induced; self-terminating; protective; coatings; substrate; gas; radiation; produce; coating; substantially; void-free; molecular; scale; degradation; resistant; deposit; apprxeq; 5-20; ang; critical; surfaces; protection; degradative; processes; including; corrosion; contamination; protective coatings; protective coating; substantially void; processes including; /427/
Citation Formats
Klebanoff, Leonard E. Process for producing radiation-induced self-terminating protective coatings on a substrate. United States: N. p., 2001.
Web.
Klebanoff, Leonard E. Process for producing radiation-induced self-terminating protective coatings on a substrate. United States.
Klebanoff, Leonard E. Mon .
"Process for producing radiation-induced self-terminating protective coatings on a substrate". United States. https://www.osti.gov/servlets/purl/873733.
@article{osti_873733,
title = {Process for producing radiation-induced self-terminating protective coatings on a substrate},
author = {Klebanoff, Leonard E},
abstractNote = {A gas and radiation are used to produce a protective coating that is substantially void-free on the molecular scale, self-terminating, and degradation resistant. The process can be used to deposit very thin (.apprxeq.5-20 .ANG.) coatings on critical surfaces needing protection from degradative processes including, corrosion and contamination.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2001},
month = {Mon Jan 01 00:00:00 EST 2001}
}
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