Method for vacuum fusion bonding
Abstract
An improved vacuum fusion bonding structure and process for aligned bonding of large area glass plates, patterned with microchannels and access holes and slots, for elevated glass fusion temperatures. Vacuum pumpout of all components is through the bottom platform which yields an untouched, defect free top surface which greatly improves optical access through this smooth surface. Also, a completely non-adherent interlayer, such as graphite, with alignment and location features is located between the main steel platform and the glass plate pair, which makes large improvements in quality, yield, and ease of use, and enables aligned bonding of very large glass structures.
- Inventors:
-
- Sunnyvale, CA
- Livermore, CA
- Stockton, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 873620
- Patent Number(s):
- 6205819
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C03 - GLASS C03B - MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02P - CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- method; vacuum; fusion; bonding; improved; structure; process; aligned; glass; plates; patterned; microchannels; access; holes; slots; elevated; temperatures; pumpout; components; bottom; platform; yields; untouched; defect; free; top; surface; greatly; improves; optical; smooth; completely; non-adherent; interlayer; graphite; alignment; location; features; located; main; steel; plate; pair; makes; improvements; quality; yield; ease; enables; structures; vacuum pumpout; vacuum fusion; defect free; optical access; smooth surface; top surface; glass plates; vacuum pump; fusion bonding; glass plate; aligned bonding; greatly improves; glass structures; improved vacuum; glass fusion; fusion bond; fusion temperatures; elevated glass; access holes; bonding structure; /65/156/264/
Citation Formats
Ackler, Harold D, Swierkowski, Stefan P, Tarte, Lisa A, and Hicks, Randall K. Method for vacuum fusion bonding. United States: N. p., 2001.
Web.
Ackler, Harold D, Swierkowski, Stefan P, Tarte, Lisa A, & Hicks, Randall K. Method for vacuum fusion bonding. United States.
Ackler, Harold D, Swierkowski, Stefan P, Tarte, Lisa A, and Hicks, Randall K. Mon .
"Method for vacuum fusion bonding". United States. https://www.osti.gov/servlets/purl/873620.
@article{osti_873620,
title = {Method for vacuum fusion bonding},
author = {Ackler, Harold D and Swierkowski, Stefan P and Tarte, Lisa A and Hicks, Randall K},
abstractNote = {An improved vacuum fusion bonding structure and process for aligned bonding of large area glass plates, patterned with microchannels and access holes and slots, for elevated glass fusion temperatures. Vacuum pumpout of all components is through the bottom platform which yields an untouched, defect free top surface which greatly improves optical access through this smooth surface. Also, a completely non-adherent interlayer, such as graphite, with alignment and location features is located between the main steel platform and the glass plate pair, which makes large improvements in quality, yield, and ease of use, and enables aligned bonding of very large glass structures.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2001},
month = {Mon Jan 01 00:00:00 EST 2001}
}
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