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Title: Thermophoretic vacuum wand

Abstract

A thermophoretic vacuum wand that is particularly suited for transporting articles in a cleanroom environment so that potential particle contaminants in the air do not become adhered to the surface of the article is described. The wand includes a housing having a platen with a front surface with suction port(s) through the platen; a vacuum source for applying a negative pressure to the suction port(s); and heating device for the object. Heating the article when it is held by the vacuum wand affords thermophoretic protection that effectively prevents particles in the air from depositing onto the article.

Inventors:
 [1];  [2]
+ Show Inventor Affiliations
  1. San Ramon, CA
  2. Lafayette, CA
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
873027
Patent Number(s):
6072157
Assignee:
EUV LLC (Santa Clara, CA)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B65 - CONVEYING B65G - TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
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DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
thermophoretic; vacuum; wand; particularly; suited; transporting; articles; cleanroom; environment; potential; particle; contaminants; air; adhered; surface; article; described; housing; platen; front; suction; source; applying; negative; pressure; heating; device; held; affords; protection; effectively; prevents; particles; depositing; vacuum wand; heating device; particularly suited; front surface; negative pressure; thermophoretic vacuum; vacuum source; cleanroom environment; particle contaminants; effectively prevents; transporting articles; potential particle; /219/269/279/294/

Citation Formats

Klebanoff, Leonard Elliott, and Rader, Daniel John. Thermophoretic vacuum wand. United States: N. p., 2000. Web.
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Klebanoff, Leonard Elliott, & Rader, Daniel John. Thermophoretic vacuum wand. United States.
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Klebanoff, Leonard Elliott, and Rader, Daniel John. Sat . "Thermophoretic vacuum wand". United States. https://www.osti.gov/servlets/purl/873027.
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@article{osti_873027,
title = {Thermophoretic vacuum wand},
author = {Klebanoff, Leonard Elliott and Rader, Daniel John},
abstractNote = {A thermophoretic vacuum wand that is particularly suited for transporting articles in a cleanroom environment so that potential particle contaminants in the air do not become adhered to the surface of the article is described. The wand includes a housing having a platen with a front surface with suction port(s) through the platen; a vacuum source for applying a negative pressure to the suction port(s); and heating device for the object. Heating the article when it is held by the vacuum wand affords thermophoretic protection that effectively prevents particles in the air from depositing onto the article.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sat Jan 01 00:00:00 EST 2000},
month = {Sat Jan 01 00:00:00 EST 2000}
}
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Works referenced in this record:

Particle deposition from a natural convection flow onto a vertical isothermal flat plate
journal, August 1987

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