Apparatus and method for sensing motion in a microelectro-mechanical system

Dickey, Fred M; Holswade, Scott C

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Title: Apparatus and method for sensing motion in a microelectro-mechanical system

Abstract

An apparatus and method are disclosed for optically sensing motion in a microelectromechanical system (also termed a MEMS device) formed by surface micromachining or LIGA. The apparatus operates by reflecting or scattering a light beam off a corrugated surface (e.g. gear teeth or a reference feature) of a moveable member (e.g. a gear, rack or linkage) within the MEMS device and detecting the reflected or scattered light. The apparatus can be used to characterize a MEMS device, measuring one or more performance characteristic such as spring and damping coefficients, torque and friction, or uniformity of motion of the moveable member. The apparatus can also be used to determine the direction and extent of motion of the moveable member; or to determine a particular mechanical state that a MEMS device is in. Finally, the apparatus and method can be used for providing feedback to the MEMS device to improve performance and reliability.

Inventors:

Dickey, Fred M ^[1]; Holswade, Scott C ^[1]

Albuquerque, NM

Issue Date:: Fri Jan 01 00:00:00 EST 1999

Research Org.:: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)

OSTI Identifier:: 872691

Patent Number(s):: 5990473

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Classifications (CPCs):: G - PHYSICS G01 - MEASURING G01D - MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE

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G - PHYSICS G01 - MEASURING G01D - MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE
G01D5/347 - using displacement encoding scales
G01D5/34723 - {involving light-guides}

Show less

DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: apparatus; method; sensing; motion; microelectro-mechanical; disclosed; optically; microelectromechanical; termed; mems; device; formed; surface; micromachining; liga; operates; reflecting; scattering; light; beam; corrugated; gear; teeth; reference; feature; moveable; rack; linkage; detecting; reflected; scattered; characterize; measuring; performance; characteristic; spring; damping; coefficients; torque; friction; uniformity; determine; direction; extent; particular; mechanical; finally; providing; feedback; improve; reliability; gear teeth; scattered light; light beam; surface micromachining; mems device; improve performance; sensing motion; performance characteristic; /250/

Citation Formats


                    Dickey, Fred M, and Holswade, Scott C. Apparatus and method for sensing motion in a microelectro-mechanical system.  United States: N. p., 1999. 
        Web.

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                    Dickey, Fred M, & Holswade, Scott C. Apparatus and method for sensing motion in a microelectro-mechanical system.  United States.

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                    Dickey, Fred M, and Holswade, Scott C. Fri .  
        "Apparatus and method for sensing motion in a microelectro-mechanical system".  United States.  https://www.osti.gov/servlets/purl/872691.

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@article{osti_872691,

  title        = {Apparatus and method for sensing motion in a microelectro-mechanical system},

  author       = {Dickey, Fred M and Holswade, Scott C},

  abstractNote = {An apparatus and method are disclosed for optically sensing motion in a microelectromechanical system (also termed a MEMS device) formed by surface micromachining or LIGA. The apparatus operates by reflecting or scattering a light beam off a corrugated surface (e.g. gear teeth or a reference feature) of a moveable member (e.g. a gear, rack or linkage) within the MEMS device and detecting the reflected or scattered light. The apparatus can be used to characterize a MEMS device, measuring one or more performance characteristic such as spring and damping coefficients, torque and friction, or uniformity of motion of the moveable member. The apparatus can also be used to determine the direction and extent of motion of the moveable member; or to determine a particular mechanical state that a MEMS device is in. Finally, the apparatus and method can be used for providing feedback to the MEMS device to improve performance and reliability.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Fri Jan 01 00:00:00 EST 1999},

  month        = {Fri Jan 01 00:00:00 EST 1999}

}

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Works referenced in this record:

Surface micromachined microengine
journal, May 1995

Garcia, Ernest J.; Sniegowski, Jeffry J.
Sensors and Actuators A: Physical, Vol. 48, Issue 3
https://doi.org/10.1016/0924-4247(95)00999-X

Ultrafine motion detection of micromechanical structures using optical moire patterns
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Tran, A. T. T. D.; Lee, J. J.; Zhang, K.
IEEE Photonics Technology Letters, Vol. 8, Issue 8
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Polymer waveguide cointegration with microelectromechanical systems (MEMS) for integrated optical metrology
conference, March 1998

Brown, Kolin S.; Taylor, B. J.; Dawson, Jeremy M.
Optoelectronics and High-Power Lasers & Applications, SPIE Proceedings
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LIGA-microtesting system with integrated strain gauges for force measurement
conference, January 1997

Ruther, P.; Bacher, W.; Feit, K.
Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots
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Microjet printing of micro-optical waveguides
conference, January 1996

Cox, W. R.; Chen, T.; Hayes, D. J.
Conference Proceedings LEOS'96 9th Annual Meeting IEEE Lasers and Electro-Optics Society
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Micro torque measurements for a prototype turbine
journal, September 1994

Mathieson, D.; Robertson, B. J.; Beerschwinger, U.
Journal of Micromechanics and Microengineering, Vol. 4, Issue 3
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Modeling an optical micromachine probe
conference, December 1997

Mittas, Anthony; Dickey, Fred M.; Holswade, Scott C.
Optical Science, Engineering and Instrumentation '97, SPIE Proceedings
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Surface-micromachined diffraction gratings for scanning spectroscopic applications
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Kiang, Meng-Hsiung; Nee, J. T.; Lau, K. Y.
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Optical measurement of LIGA milliengine performance
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Polymer guided-wave integrated optics: an enabling technology for micro-opto-electro-mechanical systems
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Hornak, Lawrence A.; Brown, Kolin S.; Taylor, B. J.
Photonics West '97, SPIE Proceedings
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In situ friction and wear measurements in integrated polysilicon mechanisms
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Sensors and Actuators A: Physical, Vol. 21, Issue 1-3
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Optical micro encoder using a twin-beam VCSEL with integrated microlenses
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Miyajima, H.; Yamamoto, E.; Yanagisawa, K.
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conference, April 1997

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Photonics West '97, SPIE Proceedings
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Friction in surface-micromachined microengines
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Miller, Samuel L.; Sniegowski, Jeffry J.; LaVigne, Glen
1996 Symposium on Smart Structures and Materials, SPIE Proceedings
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Optical measurement of micromachine engine performance
conference, September 1997

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Optical methods for characterization of MEMS device motion
conference, September 1995

Nelson, Phyllis R.; Chu, Patrick B.; Pister, Kristofer S. J.
Micromachining and Microfabrication, SPIE Proceedings
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Similar Records

Title: Apparatus and method for sensing motion in a microelectro-mechanical system

Abstract

Citation Formats

Surface micromachined microengine journal, May 1995

Ultrafine motion detection of micromechanical structures using optical moire patterns journal, August 1996

Polymer waveguide cointegration with microelectromechanical systems (MEMS) for integrated optical metrology conference, March 1998

LIGA-microtesting system with integrated strain gauges for force measurement conference, January 1997

Microjet printing of micro-optical waveguides conference, January 1996

Micro torque measurements for a prototype turbine journal, September 1994

Modeling an optical micromachine probe conference, December 1997

Surface-micromachined diffraction gratings for scanning spectroscopic applications conference, August 2002

Optical measurement of LIGA milliengine performance conference, March 1998

Polymer guided-wave integrated optics: an enabling technology for micro-opto-electro-mechanical systems conference, April 1997

In situ friction and wear measurements in integrated polysilicon mechanisms journal, February 1990

Optical micro encoder using a twin-beam VCSEL with integrated microlenses conference, January 1997

Optical probe for micromachine performance analysis conference, April 1997

Friction in surface-micromachined microengines conference, May 1996

Optical measurement of micromachine engine performance conference, September 1997

Optical methods for characterization of MEMS device motion conference, September 1995

Surface micromachined microengine
journal, May 1995

Ultrafine motion detection of micromechanical structures using optical moire patterns
journal, August 1996

Polymer waveguide cointegration with microelectromechanical systems (MEMS) for integrated optical metrology
conference, March 1998

LIGA-microtesting system with integrated strain gauges for force measurement
conference, January 1997

Microjet printing of micro-optical waveguides
conference, January 1996

Micro torque measurements for a prototype turbine
journal, September 1994

Modeling an optical micromachine probe
conference, December 1997

Surface-micromachined diffraction gratings for scanning spectroscopic applications
conference, August 2002

Optical measurement of LIGA milliengine performance
conference, March 1998

Polymer guided-wave integrated optics: an enabling technology for micro-opto-electro-mechanical systems
conference, April 1997

In situ friction and wear measurements in integrated polysilicon mechanisms
journal, February 1990

Optical micro encoder using a twin-beam VCSEL with integrated microlenses
conference, January 1997

Optical probe for micromachine performance analysis
conference, April 1997

Friction in surface-micromachined microengines
conference, May 1996

Optical measurement of micromachine engine performance
conference, September 1997

Optical methods for characterization of MEMS device motion
conference, September 1995