Deformable mirror for short wavelength applications
Abstract
A deformable mirror compatible with short wavelength (extreme ultraviolet) radiation that can be precisely controlled to nanometer and subnanometer accuracy is described. Actuators are coupled between a reaction plate and a face plate which has a reflective coating. A control system adjusts the voltage supplied to the actuators; by coordinating the voltages supplied to the actuators, the reflective surface of the mirror can be deformed to correct for dimensional errors in the mirror or to produce a desired contour.
- Inventors:
-
- 2417 Kilkare Rd., Sunol, CA 94586
- 5020 Canyon Crest Dr., San Ramon, CA 94583
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 872678
- Patent Number(s):
- 5986795
- Assignee:
- Chapman, Henry N. (2417 Kilkare Rd., Sunol, CA 94586);Sweeney, Donald W. (5020 Canyon Crest Dr., San Ramon, CA 94583)
- Patent Classifications (CPCs):
-
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- deformable; mirror; wavelength; applications; compatible; extreme; ultraviolet; radiation; precisely; controlled; nanometer; subnanometer; accuracy; described; actuators; coupled; reaction; plate; reflective; coating; control; adjusts; voltage; supplied; coordinating; voltages; surface; deformed; correct; dimensional; errors; produce; desired; contour; reflective coating; deformable mirror; extreme ultraviolet; reflective surface; voltage supplied; precisely controlled; precisely control; /359/
Citation Formats
Chapman, Henry N, and Sweeney, Donald W. Deformable mirror for short wavelength applications. United States: N. p., 1999.
Web.
Chapman, Henry N, & Sweeney, Donald W. Deformable mirror for short wavelength applications. United States.
Chapman, Henry N, and Sweeney, Donald W. Fri .
"Deformable mirror for short wavelength applications". United States. https://www.osti.gov/servlets/purl/872678.
@article{osti_872678,
title = {Deformable mirror for short wavelength applications},
author = {Chapman, Henry N and Sweeney, Donald W},
abstractNote = {A deformable mirror compatible with short wavelength (extreme ultraviolet) radiation that can be precisely controlled to nanometer and subnanometer accuracy is described. Actuators are coupled between a reaction plate and a face plate which has a reflective coating. A control system adjusts the voltage supplied to the actuators; by coordinating the voltages supplied to the actuators, the reflective surface of the mirror can be deformed to correct for dimensional errors in the mirror or to produce a desired contour.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Fri Jan 01 00:00:00 EST 1999},
month = {Fri Jan 01 00:00:00 EST 1999}
}