Method for the preparation of nanocrystalline diamond thin films
Abstract
A method and system for manufacturing nanocrystalline diamond film on a substrate such as field emission tips. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrocarbon and possibly hydrogen, and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous vapor and deposition of a diamond film on the field emission tip.
- Inventors:
-
- Downers Grove, IL
- Naperville, IL
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- OSTI Identifier:
- 871657
- Patent Number(s):
- 5772760
- Assignee:
- University Of Chicago (Chicago, IL)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C01 - INORGANIC CHEMISTRY C01B - NON-METALLIC ELEMENTS
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
- DOE Contract Number:
- W-31109-ENG-38
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- method; preparation; nanocrystalline; diamond; films; manufacturing; film; substrate; field; emission; tips; involves; forming; carbonaceous; vapor; providing; gas; stream; argon; hydrocarbon; possibly; hydrogen; combining; passing; combined; carrier; chamber; plasma; causing; fragmentation; deposition; tip; method involves; gas stream; field emission; diamond film; involves forming; carbonaceous vapor; carrier stream; causing fragmentation; chamber causing; nanocrystalline diamond; method involve; gas carrier; emission tips; /117/427/
Citation Formats
Gruen, Dieter M, and Krauss, Alan R. Method for the preparation of nanocrystalline diamond thin films. United States: N. p., 1998.
Web.
Gruen, Dieter M, & Krauss, Alan R. Method for the preparation of nanocrystalline diamond thin films. United States.
Gruen, Dieter M, and Krauss, Alan R. Tue .
"Method for the preparation of nanocrystalline diamond thin films". United States. https://www.osti.gov/servlets/purl/871657.
@article{osti_871657,
title = {Method for the preparation of nanocrystalline diamond thin films},
author = {Gruen, Dieter M and Krauss, Alan R},
abstractNote = {A method and system for manufacturing nanocrystalline diamond film on a substrate such as field emission tips. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrocarbon and possibly hydrogen, and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous vapor and deposition of a diamond film on the field emission tip.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 30 00:00:00 EDT 1998},
month = {Tue Jun 30 00:00:00 EDT 1998}
}
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