Moving zone Marangoni drying of wet objects using naturally evaporated solvent vapor
Abstract
A surface tension gradient driven flow (a Marangoni flow) is used to remove the thin film of water remaining on the surface of an object following rinsing. The process passively introduces by natural evaporation and diffusion of minute amounts of alcohol (or other suitable material) vapor in the immediate vicinity of a continuously refreshed meniscus of deionized water or another aqueous-based, nonsurfactant rinsing agent. Used in conjunction with cleaning, developing or wet etching application, rinsing coupled with Marangoni drying provides a single-step process for 1) cleaning, developing or etching, 2) rinsing, and 3) drying objects such as flat substrates or coatings on flat substrates without necessarily using heat, forced air flow, contact wiping, centrifugation or large amounts of flammable solvents. This process is useful in one-step cleaning and drying of large flat optical substrates, one-step developing/rinsing and drying or etching/rinsing/drying of large flat patterned substrates and flat panel displays during lithographic processing, and room-temperature rinsing/drying of other large parts, sheets or continuous rolls of material.
- Inventors:
-
- Oakley, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 871112
- Patent Number(s):
- 5660642
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B08 - CLEANING B08B - CLEANING IN GENERAL
F - MECHANICAL ENGINEERING F26 - DRYING F26B - DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- moving; zone; marangoni; drying; wet; naturally; evaporated; solvent; vapor; surface; tension; gradient; driven; flow; remove; film; water; remaining; following; rinsing; process; passively; introduces; natural; evaporation; diffusion; minute; amounts; alcohol; suitable; material; immediate; vicinity; continuously; refreshed; meniscus; deionized; aqueous-based; nonsurfactant; agent; conjunction; cleaning; developing; etching; application; coupled; provides; single-step; flat; substrates; coatings; necessarily; heat; forced; air; contact; wiping; centrifugation; flammable; solvents; useful; one-step; optical; patterned; panel; displays; lithographic; processing; room-temperature; sheets; continuous; rolls; optical substrates; forced air; suitable material; air flow; flat panel; surface tension; deionized water; optical substrate; panel displays; panel display; wet etching; water remaining; step process; solvent vapor; single-step process; patterned substrate; minute amounts; flat substrates; lithographic processing; /134/
Citation Formats
Britten, Jerald A. Moving zone Marangoni drying of wet objects using naturally evaporated solvent vapor. United States: N. p., 1997.
Web.
Britten, Jerald A. Moving zone Marangoni drying of wet objects using naturally evaporated solvent vapor. United States.
Britten, Jerald A. Wed .
"Moving zone Marangoni drying of wet objects using naturally evaporated solvent vapor". United States. https://www.osti.gov/servlets/purl/871112.
@article{osti_871112,
title = {Moving zone Marangoni drying of wet objects using naturally evaporated solvent vapor},
author = {Britten, Jerald A},
abstractNote = {A surface tension gradient driven flow (a Marangoni flow) is used to remove the thin film of water remaining on the surface of an object following rinsing. The process passively introduces by natural evaporation and diffusion of minute amounts of alcohol (or other suitable material) vapor in the immediate vicinity of a continuously refreshed meniscus of deionized water or another aqueous-based, nonsurfactant rinsing agent. Used in conjunction with cleaning, developing or wet etching application, rinsing coupled with Marangoni drying provides a single-step process for 1) cleaning, developing or etching, 2) rinsing, and 3) drying objects such as flat substrates or coatings on flat substrates without necessarily using heat, forced air flow, contact wiping, centrifugation or large amounts of flammable solvents. This process is useful in one-step cleaning and drying of large flat optical substrates, one-step developing/rinsing and drying or etching/rinsing/drying of large flat patterned substrates and flat panel displays during lithographic processing, and room-temperature rinsing/drying of other large parts, sheets or continuous rolls of material.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Wed Jan 01 00:00:00 EST 1997},
month = {Wed Jan 01 00:00:00 EST 1997}
}
Works referenced in this record:
Marangoni drying: A new extremely clean drying process
journal, November 1990
- Leenaars, A. F. M.; Huethorst, J. A. M.; Van Oekel, J. J.
- Langmuir, Vol. 6, Issue 11
On Marangoni drying: nonlinear kinematic waves in a thin film
journal, September 1993
- O'Brien, S. B. G. M.
- Journal of Fluid Mechanics, Vol. 254
Motion of Marangoni-contracted water drops across inclined hydrophilic surfaces
journal, November 1991
- Huethorst, J. A. M.; Marra, J.
- Langmuir, Vol. 7, Issue 11
Physical principles of Marangoni drying
journal, November 1991
- Marra, J.; Huethorst, J. A. M.
- Langmuir, Vol. 7, Issue 11