Dissipation factor as a predictor of anodic coating performance
Abstract
A dissipation factor measurement is used to predict as-anodized fixture performance prior to actual use of the fixture in an etching environment. A dissipation factor measurement of the anodic coating determines its dielectric characteristics and correlates to the performance of the anodic coating in actual use. The ability to predict the performance of the fixture and its anodized coating permits the fixture to be repaired or replaced prior to complete failure.
- Inventors:
-
- Edgewood, NM
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 869850
- Patent Number(s):
- 5410256
- Assignee:
- Sematech, Inc. (Austin, TX)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- FI04-89AL58872
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- dissipation; factor; predictor; anodic; coating; performance; measurement; predict; as-anodized; fixture; prior; etching; environment; determines; dielectric; characteristics; correlates; ability; anodized; permits; repaired; replaced; complete; failure; anodized coating; dissipation factor; factor measurement; /324/204/205/427/
Citation Formats
Panitz, Janda K. G. Dissipation factor as a predictor of anodic coating performance. United States: N. p., 1995.
Web.
Panitz, Janda K. G. Dissipation factor as a predictor of anodic coating performance. United States.
Panitz, Janda K. G. Sun .
"Dissipation factor as a predictor of anodic coating performance". United States. https://www.osti.gov/servlets/purl/869850.
@article{osti_869850,
title = {Dissipation factor as a predictor of anodic coating performance},
author = {Panitz, Janda K. G.},
abstractNote = {A dissipation factor measurement is used to predict as-anodized fixture performance prior to actual use of the fixture in an etching environment. A dissipation factor measurement of the anodic coating determines its dielectric characteristics and correlates to the performance of the anodic coating in actual use. The ability to predict the performance of the fixture and its anodized coating permits the fixture to be repaired or replaced prior to complete failure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sun Jan 01 00:00:00 EST 1995},
month = {Sun Jan 01 00:00:00 EST 1995}
}
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