Process for etching mixed metal oxides
Abstract
An etching process using dicarboxylic and tricarboxylic acids as chelating etchants for mixed metal oxide films such as high temperature superconductors and ferroelectric materials. Undesirable differential etching rates between different metal oxides are avoided by selection of the proper acid or combination of acids. Feature sizes below one micron, excellent quality vertical edges, and film thicknesses in the 100 Angstom range may be achieved by this method.
- Inventors:
-
- Edgewood, NM
- Evergreen, CO
- Issue Date:
- Research Org.:
- AT&T
- OSTI Identifier:
- 869558
- Patent Number(s):
- 5356516
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C04 - CEMENTS C04B - LIME, MAGNESIA
- DOE Contract Number:
- AC04-76DP00789
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- process; etching; mixed; metal; oxides; dicarboxylic; tricarboxylic; acids; chelating; etchants; oxide; films; temperature; superconductors; ferroelectric; materials; undesirable; differential; rates; avoided; selection; proper; acid; combination; feature; sizes; below; micron; excellent; quality; vertical; edges; film; thicknesses; 100; angstom; range; achieved; method; temperature superconductors; film thickness; etching process; oxide films; temperature superconductor; mixed metal; metal oxide; metal oxides; oxide film; carboxylic acids; carboxylic acid; feature sizes; ferroelectric material; ferroelectric materials; differential etch; /216/
Citation Formats
Ashby, Carol I. H., and Ginley, David S. Process for etching mixed metal oxides. United States: N. p., 1994.
Web.
Ashby, Carol I. H., & Ginley, David S. Process for etching mixed metal oxides. United States.
Ashby, Carol I. H., and Ginley, David S. Sat .
"Process for etching mixed metal oxides". United States. https://www.osti.gov/servlets/purl/869558.
@article{osti_869558,
title = {Process for etching mixed metal oxides},
author = {Ashby, Carol I. H. and Ginley, David S},
abstractNote = {An etching process using dicarboxylic and tricarboxylic acids as chelating etchants for mixed metal oxide films such as high temperature superconductors and ferroelectric materials. Undesirable differential etching rates between different metal oxides are avoided by selection of the proper acid or combination of acids. Feature sizes below one micron, excellent quality vertical edges, and film thicknesses in the 100 Angstom range may be achieved by this method.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sat Jan 01 00:00:00 EST 1994},
month = {Sat Jan 01 00:00:00 EST 1994}
}
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Wet Chemical Etching of High T C Superconductors by Ethylenediaminetetraacetic Acid (EDTA)
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