Production of N.sup.+ ions from a multicusp ion beam apparatus
Abstract
A method of generating a high purity (at least 98%) N.sup.+ ion beam using a multicusp ion source (10) having a chamber (11) formed by a cylindrical chamber wall (12) surrounded by a plurality of magnets (13), a filament (57) centrally disposed in said chamber, a plasma electrode (36) having an extraction orifice (41) at one end of the chamber, a magnetic filter having two parallel magnets (21, 22) spaced from said plasma electrode (36) and dividing the chamber (11) into arc discharge and extraction regions. The method includes ionizing nitrogen gas in the arc discharge region of the chamber (11), maintaining the chamber wall (12) at a positive voltage relative to the filament (57) and at a magnitude for an optimum percentage of N.sup.+ ions in the extracted ion beams, disposing a hot liner (45) within the chamber and near the chamber wall (12) to limit recombination of N.sup.+ ions into the N.sub.2.sup.+ ions, spacing the magnets (21, 22) of the magnetic filter from each other for optimum percentage of N.sup.3 ions in the extracted ion beams, and maintaining a relatively low pressure downstream of the extraction orifice and of a magnitude (preferably within the range of 3-8.times.10.sup.-4 torr)more »
- Inventors:
-
- Hercules, CA
- Berkeley, CA
- Salem, MA
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- OSTI Identifier:
- 868720
- Patent Number(s):
- 5198677
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- production; multicusp; beam; apparatus; method; generating; purity; 98; source; 10; chamber; 11; formed; cylindrical; wall; 12; surrounded; plurality; magnets; 13; filament; 57; centrally; disposed; plasma; electrode; 36; extraction; orifice; 41; magnetic; filter; parallel; 21; 22; spaced; dividing; discharge; regions; ionizing; nitrogen; gas; region; maintaining; positive; voltage; relative; magnitude; optimum; percentage; extracted; beams; disposing; hot; liner; 45; near; limit; recombination; spacing; relatively; pressure; downstream; preferably; range; 3-8; times; -4; torr; beam apparatus; nitrogen gas; centrally disposed; magnetic filter; discharge region; chamber wall; cylindrical chamber; positive voltage; plasma electrode; extraction region; /250/313/
Citation Formats
Leung, Ka-Ngo, Kunkel, Wulf B, and Walther, Steven R. Production of N.sup.+ ions from a multicusp ion beam apparatus. United States: N. p., 1993.
Web.
Leung, Ka-Ngo, Kunkel, Wulf B, & Walther, Steven R. Production of N.sup.+ ions from a multicusp ion beam apparatus. United States.
Leung, Ka-Ngo, Kunkel, Wulf B, and Walther, Steven R. Fri .
"Production of N.sup.+ ions from a multicusp ion beam apparatus". United States. https://www.osti.gov/servlets/purl/868720.
@article{osti_868720,
title = {Production of N.sup.+ ions from a multicusp ion beam apparatus},
author = {Leung, Ka-Ngo and Kunkel, Wulf B and Walther, Steven R},
abstractNote = {A method of generating a high purity (at least 98%) N.sup.+ ion beam using a multicusp ion source (10) having a chamber (11) formed by a cylindrical chamber wall (12) surrounded by a plurality of magnets (13), a filament (57) centrally disposed in said chamber, a plasma electrode (36) having an extraction orifice (41) at one end of the chamber, a magnetic filter having two parallel magnets (21, 22) spaced from said plasma electrode (36) and dividing the chamber (11) into arc discharge and extraction regions. The method includes ionizing nitrogen gas in the arc discharge region of the chamber (11), maintaining the chamber wall (12) at a positive voltage relative to the filament (57) and at a magnitude for an optimum percentage of N.sup.+ ions in the extracted ion beams, disposing a hot liner (45) within the chamber and near the chamber wall (12) to limit recombination of N.sup.+ ions into the N.sub.2.sup.+ ions, spacing the magnets (21, 22) of the magnetic filter from each other for optimum percentage of N.sup.3 ions in the extracted ion beams, and maintaining a relatively low pressure downstream of the extraction orifice and of a magnitude (preferably within the range of 3-8.times.10.sup.-4 torr) for an optimum percentage of N.sup.+ ions in the extracted ion beam.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Fri Jan 01 00:00:00 EST 1993},
month = {Fri Jan 01 00:00:00 EST 1993}
}
Works referenced in this record:
Small multicusp H − source
journal, March 1988
- Leung, K. N.; Ehlers, K. W.; Hauck, C. A.
- Review of Scientific Instruments, Vol. 59, Issue 3
Optimization of H − production from a small multicusp ion source
journal, April 1989
- Leung, K. N.; Hauck, C. A.; Kunkel, W. B.
- Review of Scientific Instruments, Vol. 60, Issue 4
Production of atomic or molecular nitrogen ion beams using a multicusp and a microwave ion source
journal, June 1988
- Walther, S. R.; Leung, K. N.; Kunkel, W. B.
- Journal of Applied Physics, Vol. 63, Issue 12