Multilayer optical dielectric coating
Abstract
A highly damage resistant, multilayer, optical reflective coating includes alternating layers of doped and undoped dielectric material. The doping levels are low enough that there are no distinct interfaces between the doped and undoped layers so that the coating has properties nearly identical to the undoped material. The coating is fabricated at high temperature with plasma-assisted chemical vapor deposition techniques to eliminate defects, reduce energy-absorption sites, and maintain proper chemical stoichiometry. A number of differently-doped layer pairs, each layer having a thickness equal to one-quarter of a predetermined wavelength in the material are combined to form a narrowband reflective coating for a predetermined wavelength. Broadband reflectors are made by using a number of narrowband reflectors, each covering a portion of the broadband.
- Inventors:
-
- Pleasanton, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 867373
- Patent Number(s):
- 4925259
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Classifications (CPCs):
-
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- multilayer; optical; dielectric; coating; highly; damage; resistant; reflective; alternating; layers; doped; undoped; material; doping; levels; distinct; interfaces; properties; nearly; identical; fabricated; temperature; plasma-assisted; chemical; vapor; deposition; techniques; eliminate; defects; reduce; energy-absorption; sites; maintain; proper; stoichiometry; differently-doped; layer; pairs; thickness; equal; one-quarter; predetermined; wavelength; combined; form; narrowband; broadband; reflectors; covering; portion; assisted chemical; reflective coating; predetermined wavelength; alternating layers; chemical vapor; vapor deposition; dielectric material; deposition techniques; doped layer; nearly identical; deposition technique; doped layers; layer pairs; optical reflective; optical dielectric; maintain proper; undoped layer; dielectric coating; doping levels; /359/
Citation Formats
Emmett, John L. Multilayer optical dielectric coating. United States: N. p., 1990.
Web.
Emmett, John L. Multilayer optical dielectric coating. United States.
Emmett, John L. Mon .
"Multilayer optical dielectric coating". United States. https://www.osti.gov/servlets/purl/867373.
@article{osti_867373,
title = {Multilayer optical dielectric coating},
author = {Emmett, John L},
abstractNote = {A highly damage resistant, multilayer, optical reflective coating includes alternating layers of doped and undoped dielectric material. The doping levels are low enough that there are no distinct interfaces between the doped and undoped layers so that the coating has properties nearly identical to the undoped material. The coating is fabricated at high temperature with plasma-assisted chemical vapor deposition techniques to eliminate defects, reduce energy-absorption sites, and maintain proper chemical stoichiometry. A number of differently-doped layer pairs, each layer having a thickness equal to one-quarter of a predetermined wavelength in the material are combined to form a narrowband reflective coating for a predetermined wavelength. Broadband reflectors are made by using a number of narrowband reflectors, each covering a portion of the broadband.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 1990},
month = {Mon Jan 01 00:00:00 EST 1990}
}