Method and apparatus for analyzing the internal chemistry and compositional variations of materials and devices
Abstract
A method and apparatus is disclosed for obtaining and mapping chemical compositional data for solid devices. It includes a SIMS mass analyzer or similar system capable of being rastered over a surface of the solid to sample the material at a pattern of selected points, as the surface is being eroded away by sputtering or a similar process. The data for each point sampled in a volume of the solid is digitally processed and indexed by element or molecule type, exact spacial location within the volume, and the concentration levels of the detected element or molecule types. This data can then be recalled and displayed for any desired planar view in the volume.
- Inventors:
-
- Lakewood, CO
- Issue Date:
- Research Org.:
- Midwest Research Institute, Kansas City, MO (United States)
- OSTI Identifier:
- 867143
- Patent Number(s):
- 4874946
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- AC02-83CH10093
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- method; apparatus; analyzing; internal; chemistry; compositional; variations; materials; devices; disclosed; obtaining; mapping; chemical; data; solid; sims; mass; analyzer; similar; capable; rastered; surface; sample; material; pattern; selected; eroded; sputtering; process; sampled; volume; digitally; processed; indexed; element; molecule; type; exact; spacial; location; concentration; levels; detected; types; recalled; displayed; desired; planar; view; chemical composition; concentration levels; mass analyzer; concentration level; /250/
Citation Formats
Kazmerski, Lawrence L. Method and apparatus for analyzing the internal chemistry and compositional variations of materials and devices. United States: N. p., 1989.
Web.
Kazmerski, Lawrence L. Method and apparatus for analyzing the internal chemistry and compositional variations of materials and devices. United States.
Kazmerski, Lawrence L. Sun .
"Method and apparatus for analyzing the internal chemistry and compositional variations of materials and devices". United States. https://www.osti.gov/servlets/purl/867143.
@article{osti_867143,
title = {Method and apparatus for analyzing the internal chemistry and compositional variations of materials and devices},
author = {Kazmerski, Lawrence L},
abstractNote = {A method and apparatus is disclosed for obtaining and mapping chemical compositional data for solid devices. It includes a SIMS mass analyzer or similar system capable of being rastered over a surface of the solid to sample the material at a pattern of selected points, as the surface is being eroded away by sputtering or a similar process. The data for each point sampled in a volume of the solid is digitally processed and indexed by element or molecule type, exact spacial location within the volume, and the concentration levels of the detected element or molecule types. This data can then be recalled and displayed for any desired planar view in the volume.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sun Jan 01 00:00:00 EST 1989},
month = {Sun Jan 01 00:00:00 EST 1989}
}
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