Starter for inductively coupled plasma tube
Abstract
A starter assembly is provided for use with an inductively coupled plasma (ICP) tube to reliably initate a plasma at internal pressures above about 30 microns. A conductive probe is inserted within the inductor coil about the tube and insulated from the tube shield assembly. A capacitive circuit is arranged for momentarily connecting a high voltage radio-frequency generator to the probe while simultaneously energizing the coil. When the plasma is initiated the probe is disconnected from the generator and electrically connected to the shield assembly for operation.
- Inventors:
-
- 969 Nambe Loop, Los Alamos, NM 87544
- 285 Donna Ave., Los Alamos, NM 87544
- Issue Date:
- Research Org.:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- OSTI Identifier:
- 866695
- Patent Number(s):
- 4766351
- Assignee:
- Hull, Donald E. (969 Nambe Loop, Los Alamos, NM 87544);Bieniewski, Thomas M. (285 Donna Ave., Los Alamos, NM 87544)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05H - PLASMA TECHNIQUE
- DOE Contract Number:
- W-7405-ENG-36
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- starter; inductively; coupled; plasma; tube; assembly; provided; icp; reliably; initate; internal; pressures; 30; microns; conductive; probe; inserted; inductor; coil; insulated; shield; capacitive; circuit; arranged; momentarily; connecting; voltage; radio-frequency; generator; simultaneously; energizing; initiated; disconnected; electrically; connected; operation; plasma tube; inductively coupled; electrically connected; coupled plasma; internal pressure; frequency generator; internal pressures; voltage radio; /315/219/313/
Citation Formats
Hull, Donald E, and Bieniewski, Thomas M. Starter for inductively coupled plasma tube. United States: N. p., 1988.
Web.
Hull, Donald E, & Bieniewski, Thomas M. Starter for inductively coupled plasma tube. United States.
Hull, Donald E, and Bieniewski, Thomas M. Fri .
"Starter for inductively coupled plasma tube". United States. https://www.osti.gov/servlets/purl/866695.
@article{osti_866695,
title = {Starter for inductively coupled plasma tube},
author = {Hull, Donald E and Bieniewski, Thomas M},
abstractNote = {A starter assembly is provided for use with an inductively coupled plasma (ICP) tube to reliably initate a plasma at internal pressures above about 30 microns. A conductive probe is inserted within the inductor coil about the tube and insulated from the tube shield assembly. A capacitive circuit is arranged for momentarily connecting a high voltage radio-frequency generator to the probe while simultaneously energizing the coil. When the plasma is initiated the probe is disconnected from the generator and electrically connected to the shield assembly for operation.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Fri Jan 01 00:00:00 EST 1988},
month = {Fri Jan 01 00:00:00 EST 1988}
}
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