Orientation filtering for crystalline films
Abstract
A substrate is coated with a film to be recrystallized. A pattern of crystallization barriers is created in the film, for example, by etching voids in the film. An encapsulation layer is generally applied to protect the film, fill the voids and otherwise enhance a recrystallization process. Recrystallization is carried out such that certain orientations pass preferentially through the barrier, generally as a result of growth-velocity anisotropy. The result is a film of a specific predetermined crystallographic orientation, a range of orientations or a set of discrete orientations.
- Inventors:
-
- Sudbury, MA
- Somerville, MA
- Watertown, MA
- Acton, MA
- Issue Date:
- OSTI Identifier:
- 866091
- Patent Number(s):
- 4632723
- Application Number:
- 06/481,096
- Assignee:
- Massachusetts Institute of Technology (Cambridge, MA)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- DOE Contract Number:
- AC02-80ER13019
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- orientation; filtering; crystalline; films; substrate; coated; film; recrystallized; pattern; crystallization; barriers; created; example; etching; voids; encapsulation; layer; applied; protect; fill; otherwise; enhance; recrystallization; process; carried; orientations; pass; preferentially; barrier; result; growth-velocity; anisotropy; specific; predetermined; crystallographic; range; set; discrete; crystalline films; orientation filter; velocity anisotropy; crystallization process; /117/
Citation Formats
Smith, Henry I, Atwater, Harry A, Thompson, Carl V, and Geis, Michael W. Orientation filtering for crystalline films. United States: N. p., 1986.
Web.
Smith, Henry I, Atwater, Harry A, Thompson, Carl V, & Geis, Michael W. Orientation filtering for crystalline films. United States.
Smith, Henry I, Atwater, Harry A, Thompson, Carl V, and Geis, Michael W. Tue .
"Orientation filtering for crystalline films". United States. https://www.osti.gov/servlets/purl/866091.
@article{osti_866091,
title = {Orientation filtering for crystalline films},
author = {Smith, Henry I and Atwater, Harry A and Thompson, Carl V and Geis, Michael W},
abstractNote = {A substrate is coated with a film to be recrystallized. A pattern of crystallization barriers is created in the film, for example, by etching voids in the film. An encapsulation layer is generally applied to protect the film, fill the voids and otherwise enhance a recrystallization process. Recrystallization is carried out such that certain orientations pass preferentially through the barrier, generally as a result of growth-velocity anisotropy. The result is a film of a specific predetermined crystallographic orientation, a range of orientations or a set of discrete orientations.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Dec 30 00:00:00 EST 1986},
month = {Tue Dec 30 00:00:00 EST 1986}
}
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