Enhanced electron amplifier structure and method of fabricating the enhanced electron amplifier structure
Abstract
An enhanced electron amplifier structure includes a microporous substrate having a front surface and a rear surface, the microporous substrate including at least one channel extending substantially through the substrate between the front surface and the rear surface, an ion diffusion layer formed on a surface of the channel, the ion diffusion layer comprising a metal oxide, a resistive coating layer formed on the first ion diffusion layer, an emissive coating layer formed on the resistive coating layer, and an optional ion feedback layer formed on the front surface of the structure. The emissive coating produces a secondary electron emission responsive to an interaction with a particle received by the channel. The ion diffusion layer, the resistive coating layer, the emissive coating layer, and the ion feedback layer are independently deposited via chemical vapor deposition or atomic layer deposition.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1771736
- Patent Number(s):
- 10867768
- Application Number:
- 15/691,633
- Assignee:
- UChicago Argonne, LLC (Chicago, IL)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- AC02-06CH11357
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 08/30/2017
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Mane, Anil U., and Elam, Jeffrey W. Enhanced electron amplifier structure and method of fabricating the enhanced electron amplifier structure. United States: N. p., 2020.
Web.
Mane, Anil U., & Elam, Jeffrey W. Enhanced electron amplifier structure and method of fabricating the enhanced electron amplifier structure. United States.
Mane, Anil U., and Elam, Jeffrey W. Tue .
"Enhanced electron amplifier structure and method of fabricating the enhanced electron amplifier structure". United States. https://www.osti.gov/servlets/purl/1771736.
@article{osti_1771736,
title = {Enhanced electron amplifier structure and method of fabricating the enhanced electron amplifier structure},
author = {Mane, Anil U. and Elam, Jeffrey W.},
abstractNote = {An enhanced electron amplifier structure includes a microporous substrate having a front surface and a rear surface, the microporous substrate including at least one channel extending substantially through the substrate between the front surface and the rear surface, an ion diffusion layer formed on a surface of the channel, the ion diffusion layer comprising a metal oxide, a resistive coating layer formed on the first ion diffusion layer, an emissive coating layer formed on the resistive coating layer, and an optional ion feedback layer formed on the front surface of the structure. The emissive coating produces a secondary electron emission responsive to an interaction with a particle received by the channel. The ion diffusion layer, the resistive coating layer, the emissive coating layer, and the ion feedback layer are independently deposited via chemical vapor deposition or atomic layer deposition.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Dec 15 00:00:00 EST 2020},
month = {Tue Dec 15 00:00:00 EST 2020}
}
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