Thermal evaporation sources for wide-area deposition
Abstract
A thermal evaporation sources are described. These thermal evaporation sources include a crucible configured to contain a volume of evaporant and a vapor space above the evaporant.
- Inventors:
- Issue Date:
- Research Org.:
- JLN Solar, Inc., Mill Valley, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1650948
- Patent Number(s):
- 10663228
- Application Number:
- 15/645,927
- Assignee:
- JLN Solar, Inc. (Mill Valley, CA)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
F - MECHANICAL ENGINEERING F27 - FURNACES F27B - FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL
- DOE Contract Number:
- ADJ-1-30630-12
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 07/10/2017
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Birkmire, Robert W., and Hanket, Gregory M. Thermal evaporation sources for wide-area deposition. United States: N. p., 2020.
Web.
Birkmire, Robert W., & Hanket, Gregory M. Thermal evaporation sources for wide-area deposition. United States.
Birkmire, Robert W., and Hanket, Gregory M. Tue .
"Thermal evaporation sources for wide-area deposition". United States. https://www.osti.gov/servlets/purl/1650948.
@article{osti_1650948,
title = {Thermal evaporation sources for wide-area deposition},
author = {Birkmire, Robert W. and Hanket, Gregory M.},
abstractNote = {A thermal evaporation sources are described. These thermal evaporation sources include a crucible configured to contain a volume of evaporant and a vapor space above the evaporant.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 26 00:00:00 EDT 2020},
month = {Tue May 26 00:00:00 EDT 2020}
}
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Thermal evaporation sources for wide-area deposition
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Thermal evaporation sources for wide-area deposition
patent, August 2017
- Birkmire, Robert W.; Hanket, Gregory M.
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