Title: Magnetoelastically actuated MEMS device and methods for its manufacture

Abstract

A magnetoelastically actuated device includes a microscale cantilever arm supported at a standoff distance from a substrate. The cantilever arm is formed as a laminar magnetic actuator configured to bend when it is subjected to a magnetic field. The cantilever arm includes a film of magnetostrictive material. Also provided is a method for fabricating the magnetoelastically actuated device. The method includes defining an actuator mold in a layer of photoresist on a structural layer of the cantilever arm and electrodepositing a layer of a magnetostrictive alloy containing cobalt and iron onto the structural layer within the actuator mold.

Inventors:

Langlois, Eric; Arrington, Christian L.; Finnegan, Patrick S.; Hollowell, Andrew E.; Pillars, Jamin Ryan; Monson, Todd

Issue Date:

Tue Dec 17 00:00:00 EST 2019

Research Org.:

Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:

USDOE National Nuclear Security Administration (NNSA)

OSTI Identifier:

1600415

Patent Number(s):

10510945

Application Number:

15/719,219

Assignee:

National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)

Patent Classifications (CPCs):

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS

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B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES

B81B2201/032 - Bimorph and unimorph actuators, e.g. piezo and thermo
B81B2203/0118 - Cantilevers
B81B3/0021 - {Transducers for transforming electrical into mechanical energy or vice versa

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS

B81C1/0015 - {Cantilevers
B81C2201/0105 - Sacrificial layer

C - CHEMISTRY C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES C25D - PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS

C25D1/003 - {3D structures, e.g. superposed patterned layers}
C25D3/38 - of copper
C25D3/562 - {containing more than 50% by weight of iron or nickel or cobalt
C25D5/18 - Electroplating using modulated, pulsed or reversing current

G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

G02B26/0825 - {the reflecting element being a flexible sheet or membrane, e.g. for varying the focus

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01F - MAGNETS

H01F1/01 - of inorganic materials

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01G - CAPACITORS

H01G5/16 - using variation of distance between electrodes

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01H - ELECTRIC SWITCHES

H01H1/0036 - {Switches making use of microelectromechanical systems [MEMS]
H01H2001/0084 - {with perpendicular movement of the movable contact relative to the substrate}
H01H55/00 - Magnetostrictive relays
H01H59/0009 - {making use of micromechanics}

H - ELECTRICITY H02 - GENERATION H02N - ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR

H02N1/006 - {of the gap-closing type

H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS

H03H3/06 - for the manufacture of magnetostrictive resonators or networks
H03H9/22 - Constructional features of resonators consisting of magnetostrictive material

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DOE Contract Number:  

AC04-94AL85000; NA0003525

Resource Type:

Patent

Resource Relation:

Patent File Date: 09/28/2017

Country of Publication:

United States

Language:

English

Subject:

36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY