DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Thickness mapping using multispectral imaging

Abstract

An example system includes a material transport system configured to transport a substantially planar material through a monitoring zone, an illumination source configured to illuminate at least a portion of the material that is within the monitoring zone with light, and a sensor configured to obtain a plurality of consecutive datasets. Datasets indicate, for locations of the material and for a specific wavelength of light, a respective intensity of the light that is of the wavelength and that is received from the location. The system also includes a processing system configured to receive the dataset, determine, based on the dataset and for each of at least two locations in the plurality of locations, a respective value of a thickness of the material, and execute, based on the respective value of the thickness of the material for at least one of the at least two locations, an action.

Inventors:
;
Issue Date:
Research Org.:
National Renewable Energy Laboratory (NREL), Golden, CO (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1600300
Patent Number(s):
10480935
Application Number:
15/830,585
Assignee:
Alliance for Sustainable Energy, LLC (Golden, CO)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
DOE Contract Number:  
AC36-08GO28308
Resource Type:
Patent
Resource Relation:
Patent File Date: 12/04/2017
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; 42 ENGINEERING

Citation Formats

Rupnowski, Przemyslaw, and Ulsh, Michael Joseph. Thickness mapping using multispectral imaging. United States: N. p., 2019. Web.
Rupnowski, Przemyslaw, & Ulsh, Michael Joseph. Thickness mapping using multispectral imaging. United States.
Rupnowski, Przemyslaw, and Ulsh, Michael Joseph. Tue . "Thickness mapping using multispectral imaging". United States. https://www.osti.gov/servlets/purl/1600300.
@article{osti_1600300,
title = {Thickness mapping using multispectral imaging},
author = {Rupnowski, Przemyslaw and Ulsh, Michael Joseph},
abstractNote = {An example system includes a material transport system configured to transport a substantially planar material through a monitoring zone, an illumination source configured to illuminate at least a portion of the material that is within the monitoring zone with light, and a sensor configured to obtain a plurality of consecutive datasets. Datasets indicate, for locations of the material and for a specific wavelength of light, a respective intensity of the light that is of the wavelength and that is received from the location. The system also includes a processing system configured to receive the dataset, determine, based on the dataset and for each of at least two locations in the plurality of locations, a respective value of a thickness of the material, and execute, based on the respective value of the thickness of the material for at least one of the at least two locations, an action.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Nov 19 00:00:00 EST 2019},
month = {Tue Nov 19 00:00:00 EST 2019}
}

Works referenced in this record:

Particle detection method and apparatus
patent, September 1988


Spectral irradiance model for tungsten halogen lamps in 340–850 nm wavelength range
journal, January 2010


Wide Angle Bistatic Scanning Optical Ranging Sensor
patent-application, March 2014


Transparent Heat Shielding Multilayer Structure
patent-application, November 2009


Display device for cameras
patent, June 1988


Defect mapping system
patent, April 1995


Intelligent light source
patent, October 2002


Fuel cell
patent, March 2010


Batteries, Electrodes for Batteries, and Methods of Their Manufacture
patent-application, January 2008


Interferometer and Shape Measuring Method
patent-application, November 2006


Combinatorial Method and Apparatus for Screening Electrochemical Materials
patent-application, January 2006


Wafer characteristics via reflectometry
patent, October 2010


Combination Thin-Film Stress and Thickness Measurement Device
patent-application, November 2003


Apparatus For Measuring Defects In A Glass Sheet
patent-application, August 2008


Optical illumination and inspection system for wafer and solar cell defects
patent, August 1994


Automated Wafer Defect Inspection System and a Process of Performing Such Inspection
patent-application, September 2010


Fourier multispectral imaging
journal, August 2015


Review of automated visual inspection 1983-1993, Part I: conventional approaches
conference, August 1993


Peripheral edge exposure method
patent, September 1998


Traversing thickness measurement apparatus and related method
patent, September 1998


Method for real-time in-line testing of semiconductor wafers
patent, November 2001


Apparatus and Method for Determining Service Life of Electrochemical Energy Sources Using Combined Ultrasonic and Electromagnetic Testing
patent-application, February 2008


Material composition analysis system and method
patent, April 2008


Automated Selection of X-Ray Reflectometry Measurement Locations
patent-application, November 2007


Carbon Nanotubes Based Nafion Composite Membranes for Fuel Cell Applications
journal, February 2010


Membrane electrode assemblies for use in fuel cells
patent, May 2007


Optical Inspection of Flat Media Using Direct Image Technology
patent-application, March 2008


Arrangement and method for inspection of surface quality
patent, December 2001


Device and method for testing a membrane electrode assembly
patent, September 2006


Surface condition judging apparatus
patent, April 1986


A New Defect Etch for Polycrystalline Silicon
journal, January 1984


Optical Disc Apparatus, an Optical Disc Method, and a Semiconductor Integrated Circuit
patent-application, June 2005


Apparatus for inspecting wafers
patent, November 1989


Measuring apparatus for etching pits
patent, June 1989


Visual Displacement Sensor
patent-application, October 2002


Thin-Film Inspection Apparatus and Inspection Method
patent-application, August 2011


Variable Electrostatic Spray Coating Apparatus and Method
patent-application, December 2002


Surface pit detection system and method
patent, December 1988


Method and its apparatus for inspecting particles or defects of a semiconductor device
patent-application, December 2005


Photovoltaic Devices in Tandem Architecture
patent-application, May 2009


Interferometer Device and Method
patent-application, May 2009


Method of inspecting microscopic surface defects
patent, May 1984


System and Method for Fuel Cell Material X-ray Analysis
patent-application, July 2008


Real-time in-line testing of semiconductor wafers
patent, June 2005


Apparatus and method for inspection of high component density printed circuit board
patent, October 1995


Surface defect inspecting apparatus
patent, December 1986


Two-phase optical inspection method and apparatus for defect detection
patent, December 1997


Multi-MEA test station and multi-MEA test method using the same
patent-application, August 2008


Method and Apparatus for Thin Film Quality Control
patent-application, April 2011


In Line Thickness Measurement
patent-application, January 2007


Non-contact optical techniques for measuring surface conditions
patent, February 1996


Method and Apparatus for Measuring Loading of Waterproofing Agent in Carbon Substrate
patent-application, February 2005


Adjustable feature access for a controlled environmental system
patent, April 2014


Determination of characteristics of material
patent, May 2000


Computer aided inspection machine
patent, May 2000


Apparatus for and a Method of Determining Surface Characteristics
patent-application, December 2009


Testing system for solar cells
patent, March 2010


High resolution monitoring of CD variations
patent, July 2009


Copying apparatus
patent, September 1986


Energy Management System and Method
patent-application, February 2011


Interferometric Endpoint Determination in a Substrate Etching Process
patent-application, June 2008


Apparatus for Characterization of Thin Film Properties and Method of Using the Same
patent-application, January 2010


Real-Time In-Line Testing of Semiconductor Wafers
patent-application, September 2005


Three-Dimensional Imaging Using a Fluorescent Medium
patent-application, January 2010


Optical Sensing System Based on a Micro-Array Structure
patent-application, July 2009


Video inspection system employing multiple spectrum LED illumination
patent, November 1994


Optical Film Measuring Device
patent-application, November 2004


Automated wafer defect inspection system and a process of performing such inspection
patent, June 2010


Processing for the optical sorting of bulk material
patent, December 1996


Optical System for Measuring Samples Using Short Wavelength Radiation
patent-application, August 2004


Fuel Cell Evaluation Method And Fuel Cell Evaluation Apparatus
patent-application, June 2008


Use of optical scattering to characterize dislocations in semiconductors
journal, January 1988


Method and system for automated measurement of whole-wafer etch pit density in GaAs
patent, April 1991


Electro-optical inspection
patent, May 1992


Measuring the Shape and Thickness Variation of a Wafer with High Slopes
patent-application, November 2009


Apparatus and Method for High-Speed Phase Shifting for Interferometric Measurement Systems
patent-application, December 2011


Radiation Image Storage Panel
patent-application, November 2002


Interferometers for the Measurement of Large Diameter Thin Wafers
patent-application, October 2007


Systems and Methods for Detecting and Indicating Fault Conditions in Electrochemical Cells
patent-application, November 2007


Method for Measuring Thin Films
patent-application, May 2007


Defect detecting device for two-layer parts, in particular for solar cells
patent, November 1994


Reflective type media sensing methodology
patent, May 2002


Methods and Systems for Detecting Biological and Chemical Materials on a Submicron Structured Substrate
patent-application, November 2008


Fluorescent penetrant inspection sensor
patent, November 1990


Determination of thin film topography
patent, February 2007


Three-dimensional range camera
patent, August 1987


Optical Detection Systems and Methods of Making and Using the Same
patent-application, October 2011


Dynamic Metrology Sampling for a Dual Damascene Process
patent-application, October 2007


In Situ Optical Diagnostic for Monitoring or Control of Sodium Diffusion in Photovoltaics Manufacturing
patent-application, April 2014


Apparatus for measuring the color of a brilliant-cut diamond
patent, November 1984


Wafer inspection method and apparatus using diffracted light
patent, July 1998


Etch pit density measuring method
patent, May 1990


Fiber Optic Based In-situ Diagnostics For PEM Fuel Cells
patent-application, May 2008


Time-domain surface profile imaging via a hyperspectral Fourier transform spectrometer
journal, June 2008


Fuel Cell Diagnostic Apparatus and Diagnostic Method
patent-application, February 2008