High sensitivity single-axis MEMS accelerometer with bilateral flexures
Abstract
A microelectromechanical systems (MEMS) accelerometer that has high sensitivity to motion along the z axis is discussed. The device includes two symmetrical sets of bilateral, diametrically opposed high aspect ratio flexures that tether a movable proof mass to the frame of the device. The flexures are designed in such a way as to restrict movement of the proof mass along the x and y axes but readily allow motion along the z axis. More specifically, when the device experiences an acceleration along the x or y axes, the proof mass is restricted from moving because some of the bilateral, diametrically opposed flexures are in compression and others are in tension.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1600276
- Patent Number(s):
- 10473687
- Application Number:
- 15/594,133
- Assignee:
- National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01P - MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK
- DOE Contract Number:
- NA0003525
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 05/12/2017
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
Citation Formats
Resnick, Paul J., Homeijer, Brian D., Friedmann, Thomas A., and Wiwi, Michael. High sensitivity single-axis MEMS accelerometer with bilateral flexures. United States: N. p., 2019.
Web.
Resnick, Paul J., Homeijer, Brian D., Friedmann, Thomas A., & Wiwi, Michael. High sensitivity single-axis MEMS accelerometer with bilateral flexures. United States.
Resnick, Paul J., Homeijer, Brian D., Friedmann, Thomas A., and Wiwi, Michael. Tue .
"High sensitivity single-axis MEMS accelerometer with bilateral flexures". United States. https://www.osti.gov/servlets/purl/1600276.
@article{osti_1600276,
title = {High sensitivity single-axis MEMS accelerometer with bilateral flexures},
author = {Resnick, Paul J. and Homeijer, Brian D. and Friedmann, Thomas A. and Wiwi, Michael},
abstractNote = {A microelectromechanical systems (MEMS) accelerometer that has high sensitivity to motion along the z axis is discussed. The device includes two symmetrical sets of bilateral, diametrically opposed high aspect ratio flexures that tether a movable proof mass to the frame of the device. The flexures are designed in such a way as to restrict movement of the proof mass along the x and y axes but readily allow motion along the z axis. More specifically, when the device experiences an acceleration along the x or y axes, the proof mass is restricted from moving because some of the bilateral, diametrically opposed flexures are in compression and others are in tension.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Nov 12 00:00:00 EST 2019},
month = {Tue Nov 12 00:00:00 EST 2019}
}
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