Apparatus for controlling heat flow within a silicon melt
Abstract
An apparatus for controlling heat flow within a melt. The apparatus may include a crucible configured to contain the melt where the melt has an exposed surface. The apparatus may also include a heater disposed below a first side of the crucible and configured to supply heat through the melt to the exposed surface, and a heat diffusion barrier assembly comprising at least one heat diffusion barrier disposed within the crucible and defining an isolation region in the melt and an outer region in the melt.
- Inventors:
- Issue Date:
- Research Org.:
- Varian Semiconductor Equipment Associates, Inc, Gloucester, MA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1576302
- Patent Number(s):
- 10415151
- Assignee:
- Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- DOE Contract Number:
- EE0000595
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2014 Mar 27
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Kellerman, Peter L., Carlson, Frederick M., Morrell, David, Moradian, Ala, and Desai, Nandish. Apparatus for controlling heat flow within a silicon melt. United States: N. p., 2019.
Web.
Kellerman, Peter L., Carlson, Frederick M., Morrell, David, Moradian, Ala, & Desai, Nandish. Apparatus for controlling heat flow within a silicon melt. United States.
Kellerman, Peter L., Carlson, Frederick M., Morrell, David, Moradian, Ala, and Desai, Nandish. Tue .
"Apparatus for controlling heat flow within a silicon melt". United States. https://www.osti.gov/servlets/purl/1576302.
@article{osti_1576302,
title = {Apparatus for controlling heat flow within a silicon melt},
author = {Kellerman, Peter L. and Carlson, Frederick M. and Morrell, David and Moradian, Ala and Desai, Nandish},
abstractNote = {An apparatus for controlling heat flow within a melt. The apparatus may include a crucible configured to contain the melt where the melt has an exposed surface. The apparatus may also include a heater disposed below a first side of the crucible and configured to supply heat through the melt to the exposed surface, and a heat diffusion barrier assembly comprising at least one heat diffusion barrier disposed within the crucible and defining an isolation region in the melt and an outer region in the melt.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Sep 17 00:00:00 EDT 2019},
month = {Tue Sep 17 00:00:00 EDT 2019}
}
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