Method for forming diffusion regions in a silicon substrate

Wu, Kahn C.; Kraft, Steven M.; Loscutoff, Paul; Molesa, Steven Edward

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Title: Method for forming diffusion regions in a silicon substrate

Abstract

A method of manufacturing solar cells is disclosed. The method comprises depositing an etch-resistant dopant material on a silicon substrate, the etch-resistant dopant material comprising a dopant source, forming a cross-linked matrix in the etch-resistant dopant material using a non-thermal cure of the etch-resistant dopant material, and heating the silicon substrate and the etch-resistant dopant material to a temperature sufficient to cause the dopant source to diffuse into the silicon substrate.

Inventors:: Wu, Kahn C.; Kraft, Steven M.; Loscutoff, Paul; Molesa, Steven Edward

Issue Date:: Tue Nov 19 00:00:00 EST 2013

Research Org.:: SunPower Corp., San Jose, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1531886

Patent Number(s):: 8586397

Application Number:: 13/250,594

Assignee:: SunPower Corporation (San Jose, CA)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L31/028 - including, apart from doping material or other impurities, only elements of Group IV of the Periodic System
H01L31/182 - {Special manufacturing methods for polycrystalline Si, e.g. Si ribbon, poly Si ingots, thin films of polycrystalline Si}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
Y02E10/546 - Polycrystalline silicon PV cells
Y02E10/547 - Monocrystalline silicon PV cells

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02P - CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
Y02P70/50 - Manufacturing or production processes characterised by the final manufactured product

Show less

DOE Contract Number:: FC36-07GO17043

Resource Type:: Patent

Resource Relation:: Patent File Date: 2011-09-30

Country of Publication:: United States

Language:: English

Subject:: 14 SOLAR ENERGY; 42 ENGINEERING

Citation Formats


                    Wu, Kahn C., Kraft, Steven M., Loscutoff, Paul, and Molesa, Steven Edward. Method for forming diffusion regions in a silicon substrate.  United States: N. p., 2013. 
        Web.

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                    Wu, Kahn C., Kraft, Steven M., Loscutoff, Paul, & Molesa, Steven Edward. Method for forming diffusion regions in a silicon substrate.  United States.

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                    Wu, Kahn C., Kraft, Steven M., Loscutoff, Paul, and Molesa, Steven Edward. Tue .  
        "Method for forming diffusion regions in a silicon substrate".  United States.  https://www.osti.gov/servlets/purl/1531886.

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@article{osti_1531886,

  title        = {Method for forming diffusion regions in a silicon substrate},

  author       = {Wu, Kahn C. and Kraft, Steven M. and Loscutoff, Paul and Molesa, Steven Edward},

  abstractNote = {A method of manufacturing solar cells is disclosed. The method comprises depositing an etch-resistant dopant material on a silicon substrate, the etch-resistant dopant material comprising a dopant source, forming a cross-linked matrix in the etch-resistant dopant material using a non-thermal cure of the etch-resistant dopant material, and heating the silicon substrate and the etch-resistant dopant material to a temperature sufficient to cause the dopant source to diffuse into the silicon substrate.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Nov 19 00:00:00 EST 2013},

  month        = {Tue Nov 19 00:00:00 EST 2013}

}

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Works referenced in this record:

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patent-application, February 2008

Teppe, Andreas; Engelhart, Peter; Muller, Jorg
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Radiation resistant passivation of silicon solar cells
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High Order Silane Composition and Method of Manufacturing a Film-Coated Substrate
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Shimoda, Tatsuya; Matsuki, Yasuo; Masuda, Takashi
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Works referencing / citing this record:

Dopant ink composition and method of fabricating a solar cell there from
patent, October 2017

Loscutoff, Paul; Wu, Kahn; Molesa, Steven
US Patent Document 9,799,783
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9799783

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patent, October 2018

Antony, Ashish; Emr, Kevin; Musser, Jordon
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URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/D832495

Lighting module heatsink
patent, October 2018

Antony, Ashish; Emr, Kevin; Musser, Jordon
US Patent Document D832,494
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/D832494

Lighting module locking endcap
patent, November 2018

Antony, Ashish; Emr, Kevin; Musser, Jordon
US Patent Document D833,061
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/D833061

Dopant precursors for mono-layer doping
patent, March 2018

Cameron, Thomas M.; Cooper, Emanuel I.; Han, Sung
US Patent Document 9,929,014
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9929014

Lighting apparatus
patent, July 2018

Musser, Jordon; Stratas, Chris; Antony, Ashish
US Patent Document D822,890
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/D822890

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Similar Records

Title: Method for forming diffusion regions in a silicon substrate

Abstract

Citation Formats

Method for the Contact Separation of Electrically-Conducting Layers on the Back Contacts of Solar Cells and Corresponding Solar Cells patent-application, February 2008

Method of fabricating polysilicon emitters for solar cells patent, October 1991

Inkjet-Printed Line Morphologies and Temperature Control of the Coffee Ring Effect journal, March 2008

Radiation resistant passivation of silicon solar cells patent, July 1991

Printed non-volatile memory patent, May 2010

Process for continuously producing an aromatic polyimide film patent, September 1984

Ordered nanoenergetic composites and synthesis method patent-application, May 2007

Printed dopant layers patent, August 2010

Metal inks for improved contact resistance patent, July 2011

Gapfill Improvement With Low Etch Rate Dielectric Liners patent-application, April 2010

High Order Silane Composition and Method of Manufacturing a Film-Coated Substrate patent-application, December 2011

Methods for Simultaneously Forming N-Type and P-Type Doped Regions Using Non-Contact Printing Processes patent-application, April 2010

Compositions for Forming Doped Regions in Semiconductor Substrates, Methods for Fabricating Such Compositions, and Methods for Forming Doped Regions Using Such Compositions patent-application, January 2011

Bilevel contact solar cells patent, October 1991

Nanoparticles and method for making the same patent-application, May 2006

Method of fabricating back surface point contact solar cells patent, May 1990

Back Side Contact Solar Cell Structures And Fabrication Processes patent-application, January 2011

Technique for the removal of residual spin-on-glass (SOG) after full SOG etchback patent, May 1998

Interdigitated Back Contact Silicon Solar Cells With Separating Grooves patent-application, March 2011

Solar Module Structures and Assembly Methods for Three-Dimensional Thin-Film Solar Cells patent-application, December 2009

Dopant ink composition and method of fabricating a solar cell there from patent, October 2017

Lighting module locking mechanism patent, October 2018

Lighting module heatsink patent, October 2018

Lighting module locking endcap patent, November 2018

Dopant precursors for mono-layer doping patent, March 2018

Lighting apparatus patent, July 2018

Method for the Contact Separation of Electrically-Conducting Layers on the Back Contacts of Solar Cells and Corresponding Solar Cells
patent-application, February 2008

Method of fabricating polysilicon emitters for solar cells
patent, October 1991

Inkjet-Printed Line Morphologies and Temperature Control of the Coffee Ring Effect
journal, March 2008

Radiation resistant passivation of silicon solar cells
patent, July 1991

Printed non-volatile memory
patent, May 2010

Process for continuously producing an aromatic polyimide film
patent, September 1984

Ordered nanoenergetic composites and synthesis method
patent-application, May 2007

Printed dopant layers
patent, August 2010

Metal inks for improved contact resistance
patent, July 2011

Gapfill Improvement With Low Etch Rate Dielectric Liners
patent-application, April 2010

High Order Silane Composition and Method of Manufacturing a Film-Coated Substrate
patent-application, December 2011

Methods for Simultaneously Forming N-Type and P-Type Doped Regions Using Non-Contact Printing Processes
patent-application, April 2010

Compositions for Forming Doped Regions in Semiconductor Substrates, Methods for Fabricating Such Compositions, and Methods for Forming Doped Regions Using Such Compositions
patent-application, January 2011

Bilevel contact solar cells
patent, October 1991

Nanoparticles and method for making the same
patent-application, May 2006

Method of fabricating back surface point contact solar cells
patent, May 1990

Back Side Contact Solar Cell Structures And Fabrication Processes
patent-application, January 2011

Technique for the removal of residual spin-on-glass (SOG) after full SOG etchback
patent, May 1998

Interdigitated Back Contact Silicon Solar Cells With Separating Grooves
patent-application, March 2011

Solar Module Structures and Assembly Methods for Three-Dimensional Thin-Film Solar Cells
patent-application, December 2009

Dopant ink composition and method of fabricating a solar cell there from
patent, October 2017

Lighting module locking mechanism
patent, October 2018

Lighting module heatsink
patent, October 2018

Lighting module locking endcap
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Dopant precursors for mono-layer doping
patent, March 2018

Lighting apparatus
patent, July 2018