Organic vapor jet deposition using an exhaust

Forrest, Stephen; Lunt, Richard

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A - human necessities
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Title: Organic vapor jet deposition using an exhaust

Abstract

Methods and systems for organic vapor jet deposition are provided, where an exhaust is disposed between adjacent nozzles. One or more carrier gases may be provided and ejected from a plurality of nozzles. An exhaust may be provided to create a localized vacuum between nozzles. The exhaust may reduce pressure buildup in the nozzles and between the nozzles and the substrate, leading to improved deposition profiles, resolution, and improved nozzle-to-nozzle uniformity. The exhaust may be in fluid communication with an ambient vacuum, or may be directly connected to a vacuum source.

Inventors:: Forrest, Stephen; Lunt, Richard

Issue Date:: Tue Feb 01 00:00:00 EST 2011

Research Org.:: Univ. of Michigan, Ann Arbor, MI (United States); Princeton Univ., NJ (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1531670

Patent Number(s):: 7879401

Application Number:: 11/643,795

Assignee:: The Regents of the University of Michigan (Ann Arbor, MI); The Trustees of Princeton University (Princeton, NJ)

Patent Classifications (CPCs):: C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C14/12 - Organic material
C23C14/24 - Vacuum evaporation
C23C16/4412 - {Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps}
C23C16/4551 - {Jet streams}
C23C16/45561 - {Gas plumbing upstream of the reaction chamber}
C23C16/45563 - {Gas nozzles}
C23C16/45574 - {Nozzles for more than one gas}

Show less

DOE Contract Number:: FC26-04NT42273

Resource Type:: Patent

Resource Relation:: Patent File Date: 2006-12-22

Country of Publication:: United States

Language:: English

Citation Formats


                    Forrest, Stephen, and Lunt, Richard. Organic vapor jet deposition using an exhaust.  United States: N. p., 2011. 
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                    Forrest, Stephen, & Lunt, Richard. Organic vapor jet deposition using an exhaust.  United States.

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                    Forrest, Stephen, and Lunt, Richard. Tue .  
        "Organic vapor jet deposition using an exhaust".  United States.  https://www.osti.gov/servlets/purl/1531670.

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@article{osti_1531670,

  title        = {Organic vapor jet deposition using an exhaust},

  author       = {Forrest, Stephen and Lunt, Richard},

  abstractNote = {Methods and systems for organic vapor jet deposition are provided, where an exhaust is disposed between adjacent nozzles. One or more carrier gases may be provided and ejected from a plurality of nozzles. An exhaust may be provided to create a localized vacuum between nozzles. The exhaust may reduce pressure buildup in the nozzles and between the nozzles and the substrate, leading to improved deposition profiles, resolution, and improved nozzle-to-nozzle uniformity. The exhaust may be in fluid communication with an ambient vacuum, or may be directly connected to a vacuum source.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Feb 01 00:00:00 EST 2011},

  month        = {Tue Feb 01 00:00:00 EST 2011}

}

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Works referenced in this record:

Direct mask-free patterning of molecular organic semiconductors using organic vapor jet printing
journal, October 2004

Shtein, Max; Peumans, Peter; Benziger, Jay B.
Journal of Applied Physics, Vol. 96, Issue 8, p. 4500-4507
https://doi.org/10.1063/1.1791760

Multicolor display devices
patent, January 2000

Thompson, Mark E.; Forrest, Stephen R.
US Patent Document 6,013,982
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6013982

Fabrication of organic semiconductor devices using ink jet printing
patent, July 2000

Sturm, James C.; Wu, Chung-Chih; Marcy, Duane
US Patent Document 6,087,196
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6087196

Bipolar organic devices
patent, June 2006

Forrest, Stephen R.; Xue, Jiangeng
US Patent Document 7,061,011
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7061011

Process and apparatus for organic vapor jet deposition
patent, October 2008

Shtein, Max; Forrest, Stephen R.
US Patent Document 7,431,968
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7431968

Micropatterning of small molecular weight organic semiconductor thin films using organic vapor phase deposition
journal, April 2003

Shtein, Max; Peumans, Peter; Benziger, Jay B.
Journal of Applied Physics, Vol. 93, Issue 7
https://doi.org/10.1063/1.1557783

Material arranging method, film-forming apparatus, electronic device and manufacturing method thereof, electro-optical device and manufacturing method thereof, and electronic apparatus
patent-application, March 2004

Miyazawa, Takashi
US Patent Application 10/630864; 20040056915
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040056915

Method and apparatus for depositing material
patent-application, April 2005

Shtein, Max; Forrest, Stephen R.; Michels, Joe
US Patent Application 10/690704; 20050087131
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050087131

Device and method for organic vapor jet deposition
patent-application, March 2004

Shtein, Max; Forrest, Stephen R.; Benzinger, Jay B.
US Patent Application 10/422269; 20040048000
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040048000

Multicolor organic light emitting devices
patent, January 1998

Forrest, Stephen R.; Thompson, Mark E.; Burrows, Paul E.
US Patent Document 5,707,745
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5707745

Low pressure vapor phase deposition of organic thin films
patent, January 2002

Forrest, Stephen R.; Burrows, Paul E.; Ban, Vladimir Sinisa
US Patent Document 6,337,102
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6337102

Transparent contacts for organic devices
patent, December 1997

Forrest, Stephen R.; Thompson, Mark E.; Burrows, Paul E.
US Patent Document 5,703,436
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5703436

Evaporation system and method for gas jet deposition of thin film materials
patent, October 1994

Schmitt, Jerome J.; Halpern, Bret
US Patent Document 5,356,673
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5356673

Method for patterning organic thin film devices using a die
patent, October 2002

Kim, Changsoon; Burrows, Paul E.; Forrest, Stephen R.
US Patent Document 6,468,819
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6468819

OLEDs doped with phosphorescent compounds
patent, October 2001

Thompson, Mark E.; You, Yujian; Shoustikov, Andrei
US Patent Document 6,303,238
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6303238

Method for patterning devices
patent, September 2001

Kim, Changsoon; Burrows, Paul E.; Forrest, Stephen R.
US Patent Document 6,294,398
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6294398

OLEDs utilizing direct injection to the triplet state
patent-application, December 2006

Forrest, Stephen; Brown, Julia J.; Thompson, Mark E.
US Patent Application 11/274091; 20060279204
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060279204

Vacuum deposited, non-polymeric flexible organic light emitting devices
patent, December 1998

Gu, Gong; Burrows, Paul E.; Forrest, Stephen R.
US Patent Document 5,844,363
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5844363

Process and Apparatus for Organic Vapor Jet Deposition
patent-application, September 2008

Shtein, Max; Forrest, Stephen R.
US Patent Application 10/233470; 20080233287
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080233287

Works referencing / citing this record:

Parallel single substrate marangoni module
patent, November 2016

Keigler, Arthur; Goodman, Daniel; Guarnaccia, David G.
US Patent Document 9,508,582
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9508582

Deposition of patterned organic thin films
patent, November 2015

McGraw, Gregory; Burrows, Paul E.; Harikrishna Mohan, Siddharth
US Patent Document 9,178,184
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9178184

Parallel single substrate processing system
patent, March 2016

Keigler, Arthur; Fisher, Freeman; Goodman, Daniel
US Patent Document 9,293,356
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9293356

Parallel single substrate processing system with alignment features on a process section frame
patent, February 2016

Keigler, Arthur
US Patent Document 9,257,319
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9257319

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Title: Organic vapor jet deposition using an exhaust

Abstract

Citation Formats

Direct mask-free patterning of molecular organic semiconductors using organic vapor jet printing journal, October 2004

Multicolor display devices patent, January 2000

Fabrication of organic semiconductor devices using ink jet printing patent, July 2000

Bipolar organic devices patent, June 2006

Process and apparatus for organic vapor jet deposition patent, October 2008

Micropatterning of small molecular weight organic semiconductor thin films using organic vapor phase deposition journal, April 2003

Material arranging method, film-forming apparatus, electronic device and manufacturing method thereof, electro-optical device and manufacturing method thereof, and electronic apparatus patent-application, March 2004

Method and apparatus for depositing material patent-application, April 2005

Device and method for organic vapor jet deposition patent-application, March 2004

Multicolor organic light emitting devices patent, January 1998

Low pressure vapor phase deposition of organic thin films patent, January 2002

Transparent contacts for organic devices patent, December 1997

Evaporation system and method for gas jet deposition of thin film materials patent, October 1994

Method for patterning organic thin film devices using a die patent, October 2002

OLEDs doped with phosphorescent compounds patent, October 2001

Method for patterning devices patent, September 2001

OLEDs utilizing direct injection to the triplet state patent-application, December 2006

Vacuum deposited, non-polymeric flexible organic light emitting devices patent, December 1998

Process and Apparatus for Organic Vapor Jet Deposition patent-application, September 2008

Parallel single substrate marangoni module patent, November 2016

Deposition of patterned organic thin films patent, November 2015

Parallel single substrate processing system patent, March 2016

Parallel single substrate processing system with alignment features on a process section frame patent, February 2016

Direct mask-free patterning of molecular organic semiconductors using organic vapor jet printing
journal, October 2004

Multicolor display devices
patent, January 2000

Fabrication of organic semiconductor devices using ink jet printing
patent, July 2000

Bipolar organic devices
patent, June 2006

Process and apparatus for organic vapor jet deposition
patent, October 2008

Micropatterning of small molecular weight organic semiconductor thin films using organic vapor phase deposition
journal, April 2003

Material arranging method, film-forming apparatus, electronic device and manufacturing method thereof, electro-optical device and manufacturing method thereof, and electronic apparatus
patent-application, March 2004

Method and apparatus for depositing material
patent-application, April 2005

Device and method for organic vapor jet deposition
patent-application, March 2004

Multicolor organic light emitting devices
patent, January 1998

Low pressure vapor phase deposition of organic thin films
patent, January 2002

Transparent contacts for organic devices
patent, December 1997

Evaporation system and method for gas jet deposition of thin film materials
patent, October 1994

Method for patterning organic thin film devices using a die
patent, October 2002

OLEDs doped with phosphorescent compounds
patent, October 2001

Method for patterning devices
patent, September 2001

OLEDs utilizing direct injection to the triplet state
patent-application, December 2006

Vacuum deposited, non-polymeric flexible organic light emitting devices
patent, December 1998

Process and Apparatus for Organic Vapor Jet Deposition
patent-application, September 2008

Parallel single substrate marangoni module
patent, November 2016

Deposition of patterned organic thin films
patent, November 2015

Parallel single substrate processing system
patent, March 2016

Parallel single substrate processing system with alignment features on a process section frame
patent, February 2016