Controlled fabrication of gaps in electrically conducting structures

Golovchenko, Jene A.; Schrmann, Gregor M.; King, Gavin M.; Branton, Daniel

Advanced Search OptionsAdvanced Search queries use a traditional Term Search. For more info, see our FAQ.

All Fields:

Patent Title:

Abstract:

Assignee:

Inventor(s):

Patent Number:

Patent Classification (CPC):

All Classifications
A - human necessities
A01 - agriculture
A21 - baking
A22 - butchering
A23 - foods or foodstuffs
A24 - tobacco
A41 - wearing apparel
A42 - headwear
A43 - footwear
A44 - haberdashery
A45 - hand or travelling articles
A46 - brushware
A47 - furniture
A61 - medical or veterinary science
A62 - life-saving
A63 - sports
A99 - subject matter not otherwise provided for in this section
B - performing operations
B01 - physical or chemical processes or apparatus in general
B02 - crushing, pulverising, or disintegrating
B03 - separation of solid materials using liquids or using pneumatic tables or jigs
B04 - centrifugal apparatus or machines for carrying-out physical or chemical processes
B05 - spraying or atomising in general
B06 - generating or transmitting mechanical vibrations in general
B07 - separating solids from solids
B08 - cleaning
B09 - disposal of solid waste
B21 - mechanical metal-working without essentially removing material
B22 - casting
B23 - machine tools
B24 - grinding
B25 - hand tools
B26 - hand cutting tools
B27 - working or preserving wood or similar material
B28 - working cement, clay, or stone
B29 - working of plastics
B30 - presses
B31 - making articles of paper, cardboard or material worked in a manner analogous to paper
B32 - layered products
B33 - additive manufacturing technology
B41 - printing
B42 - bookbinding
B43 - writing or drawing implements
B44 - decorative arts
B60 - vehicles in general
B61 - railways
B62 - land vehicles for travelling otherwise than on rails
B63 - ships or other waterborne vessels
B64 - aircraft
B65 - conveying
B66 - hoisting
B67 - opening, closing {or cleaning} bottles, jars or similar containers
B68 - saddlery
B81 - microstructural technology
B82 - nanotechnology
B99 - subject matter not otherwise provided for in this section
C - chemistry
C01 - inorganic chemistry
C02 - treatment of water, waste water, sewage, or sludge
C03 - glass
C04 - cements
C05 - fertilisers
C06 - explosives
C07 - organic chemistry
C08 - organic macromolecular compounds
C09 - dyes
C10 - petroleum, gas or coke industries
C11 - animal or vegetable oils, fats, fatty substances or waxes
C12 - biochemistry
C13 - sugar industry
C14 - skins
C21 - metallurgy of iron
C22 - metallurgy
C23 - coating metallic material
C25 - electrolytic or electrophoretic processes
C30 - crystal growth
C40 - combinatorial technology
C99 - subject matter not otherwise provided for in this section
D - textiles
D01 - natural or man-made threads or fibres
D02 - yarns
D03 - weaving
D04 - braiding
D05 - sewing
D06 - treatment of textiles or the like
D07 - ropes
D10 - indexing scheme associated with sublasses of section d, relating to textiles
D21 - paper-making
D99 - subject matter not otherwise provided for in this section
E - fixed constructions
E01 - construction of roads, railways, or bridges
E02 - hydraulic engineering
E03 - water supply
E04 - building
E05 - locks
E06 - doors, windows, shutters, or roller blinds in general
E21 - earth drilling
E99 - subject matter not otherwise provided for in this section
F - mechanical engineering
F01 - machines or engines in general
F02 - combustion engines
F03 - machines or engines for liquids
F04 - positive - displacement machines for liquids
F05 - indexing schemes relating to engines or pumps in various subclasses of classes f01-f04
F15 - fluid-pressure actuators
F16 - engineering elements and units
F17 - storing or distributing gases or liquids
F21 - lighting
F22 - steam generation
F23 - combustion apparatus
F24 - heating
F25 - refrigeration or cooling
F26 - drying
F27 - furnaces
F28 - heat exchange in general
F41 - weapons
F42 - ammunition
F99 - subject matter not otherwise provided for in this section
G - physics
G01 - measuring
G02 - optics
G03 - photography
G04 - horology
G05 - controlling
G06 - computing
G07 - checking-devices
G08 - signalling
G09 - education
G10 - musical instruments
G11 - information storage
G12 - instrument details
G16 - information and communication technology [ict] specially adapted for specific application fields
G21 - nuclear physics
G99 - subject matter not otherwise provided for in this section
H - electricity
H01 - basic electric elements
H02 - generation
H03 - basic electronic circuitry
H04 - electric communication technique
H05 - electric techniques not otherwise provided for
H99 - subject matter not otherwise provided for in this section
Y - new / cross sectional technologies
Y02 - technologies or applications for mitigation or adaptation against climate change
Y04 - information or communication technologies having an impact on other technology areas
Y10 - technical subjects covered by former uspc

More Options ...

Title: Controlled fabrication of gaps in electrically conducting structures

Abstract

A method for controlling a gap in an electrically conducting solid state structure provided with a gap. The structure is exposed to a fabrication process environment conditions of which are selected to alter an extent of the gap. During exposure of the structure to the process environment, a voltage bias is applied across the gap. Electron tunneling current across the gap is measured during the process environment exposure and the process environment is controlled during process environment exposure based on tunneling current measurement. A method for controlling the gap between electrically conducting electrodes provided on a support structure. Each electrode has an electrode tip separated from other electrode tips by a gap. The electrodes are exposed to a flux of ions causing transport of material of the electrodes to corresponding electrode tips, locally adding material of the electrodes to electrode tips in the gap.

Inventors:: Golovchenko, Jene A.; Schrmann, Gregor M.; King, Gavin M.; Branton, Daniel

Issue Date:: Tue Sep 01 00:00:00 EDT 2009

Research Org.:: Harvard Univ., Cambridge, MA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1531597

Patent Number(s):: 7582490

Application Number:: 10/767,102

Assignee:: President and Fellows of Harvard College (Cambridge, MA)

Patent Classifications (CPCs):: G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

Show more

G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N33/48721 - {Investigating individual macromolecules, e.g. by translocation through nanopores

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T436/11 - Automated chemical analysis
Y10T436/12 - Condition responsive control

Show less

DOE Contract Number:: FG02-01ER45922

Resource Type:: Patent

Resource Relation:: Patent File Date: 2004-01-29

Country of Publication:: United States

Language:: English

Citation Formats


                    Golovchenko, Jene A., Schrmann, Gregor M., King, Gavin M., and Branton, Daniel. Controlled fabrication of gaps in electrically conducting structures.  United States: N. p., 2009. 
        Web.

Copy to clipboard


                    Golovchenko, Jene A., Schrmann, Gregor M., King, Gavin M., & Branton, Daniel. Controlled fabrication of gaps in electrically conducting structures.  United States.

Copy to clipboard


                    Golovchenko, Jene A., Schrmann, Gregor M., King, Gavin M., and Branton, Daniel. Tue .  
        "Controlled fabrication of gaps in electrically conducting structures".  United States.  https://www.osti.gov/servlets/purl/1531597.

Copy to clipboard


                    
@article{osti_1531597,

  title        = {Controlled fabrication of gaps in electrically conducting structures},

  author       = {Golovchenko, Jene A. and Schrmann, Gregor M. and King, Gavin M. and Branton, Daniel},

  abstractNote = {A method for controlling a gap in an electrically conducting solid state structure provided with a gap. The structure is exposed to a fabrication process environment conditions of which are selected to alter an extent of the gap. During exposure of the structure to the process environment, a voltage bias is applied across the gap. Electron tunneling current across the gap is measured during the process environment exposure and the process environment is controlled during process environment exposure based on tunneling current measurement. A method for controlling the gap between electrically conducting electrodes provided on a support structure. Each electrode has an electrode tip separated from other electrode tips by a gap. The electrodes are exposed to a flux of ions causing transport of material of the electrodes to corresponding electrode tips, locally adding material of the electrodes to electrode tips in the gap.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Sep 01 00:00:00 EDT 2009},

  month        = {Tue Sep 01 00:00:00 EDT 2009}

}

Copy to clipboard

Patent:

Save / Share:

Export Metadata

Save to My Library

Works referenced in this record:

Method of making an electrode tip for a tunnel current sensing device
patent, April 1995

Peters, Rex B.; Woodruff, James R.
US Patent Document 5,407,868
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5407868

Pulsed ion beam control of solid state features
patent-application, January 2005

Golovchenko, Jene A.; Stein, Derek M.; Li, Jiali
US Patent Application 10/695381; 20050006224
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050006224

Micromachined probes for nanometer scale measurements and methods of making such probes
patent, October 1999

Williams, Clayton C.; Davis, Robert C.; Neuzil, Pavel
US Patent Document 5,969,345
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5969345

Nucleic acid sequencing by raman monitoring of molecular deconstruction
patent-application, March 2003

Yamakawa, Mineo; Berlin, Andrew; Kirch, Steven J.
US Patent Application 09/962555; 20030058799
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030058799

Method for determining etch depth
patent, May 2002

Barsky, Michael E.; Lai, Richard; Grundbacher, Ronald W.
US Patent Document 6,383,826
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6383826

Control of solid state dimensional features
patent, August 2004

Golovchenko, Jene A.; Branton, Daniel; Aziz, Michael J.
US Patent Document 6,783,643
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6783643

High-precision feedback control for ion sculpting of solid state features
patent-application, June 2005

Golovchenko, Jene A.; Stein, Derek M.; Yefchak, George E.
US Patent Application 10/960176; 20050126905
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050126905

Method for the manufacture of a membrane-containing microstructure
patent, October 1999

Ohman, Ove; Vieider, Christian
US Patent Document 5,962,081
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5962081

Mask for ion, electron or X-ray lithography and method of making it
patent, August 1989

Zapka, Werner; Kempf, Jurgen; Keyser, Joachim
US Patent Document 4,855,197
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4855197

Superconducting junctions and method of making same
patent, June 1993

Kapitulnik, Aharon
US Patent Document 5,219,826
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5219826

Manufacturing unit for semiconductor devices
patent, September 1993

Aoyagi, Nobuaki
US Patent Document 5,244,527
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5244527

Membrane filter and a method of manufacturing the same as well as a membrane
patent, May 1998

Van Rijn, Cornelis Johannes Maria
US Patent Document 5,753,014
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5753014

Ellipsometric control of material growth
patent, February 1992

Aspnes, David E.; Quinn, William E.
US Patent Document 5,091,320
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5091320

Dimension measurement of a semiconductor device
patent, July 1998

Shu, Jing-Shing
US Patent Document 5,780,852
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5780852

Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters
patent, August 1998

Chu, Wen-Hwa; Ferrari, Mauro
US Patent Document 5,798,042
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5798042

Use of focused ion and electron beams for fabricating a sensor on a probe tip used for scanning multiprobe microscopy and the like
patent, November 1998

Majumdar, Arunava; Lai, Jie; Luo, Ke
US Patent Document 5,838,005
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5838005

Measurement system and measurement method
patent, December 1998

Katsumata, Ryota; Hayasaka, Nobuo; Yasuda, Naoki
US Patent Document 5,851,842
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5851842

Control of solid state dimensional features
patent, October 2002

Golovchenko, Jene A.; Branton, Daniel; Stein, Derek
US Patent Document 6,464,842
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6464842

Microfabricated capsules for immunological isolation of cell transplants
patent, April 1999

Keller, Christopher Guild; Ferrari, Mauro
US Patent Document 5,893,974
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5893974

Sub-micron chemical imaging with near-field laser desorption
patent, June 2000

Baldeschwieler, John D.; Beauchamp, Jesse L.; Widmer, Marcel
US Patent Document 6,080,586
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6080586

Subnanoscale composite, N2-permselective membrane for the separation of volatile organic compounds
patent, August 1998

Levy, Roland A.; Ramos, Emmanuel Silvestre
US Patent Document 5,789,024
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5789024

Growth method by repeatedly measuring flux in MBE chamber
patent, September 1996

Celii, Francis G.; Kao, Yung-Chung; Purdes, Andrew J.
US Patent Document 5,556,462
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5556462

Material deposition techniques for control of solid state aperture surface properties
patent-application, November 2005

Branton, Daniel; Gordon, Roy G.; Chen, Peng
US Patent Application 11/015349; 20050241933
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050241933

Self-assembled nanometer lithographic masks and templates and method for parallel fabrication of nanometer scale multi-device structures
patent, March 1988

Clark, Noel A.; Douglas, Kenneth; Rothschild, Kenneth J.
US Patent Document 4,728,591
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4728591

Formation of a multi-nozzle ink jet
patent, June 1984

Tamai, Masayoshi
US Patent Document 4,455,192
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4455192

Method of fabricatring sub-half-micron trenches and holes
patent, May 1995

Hsu, David S. Y.
US Patent Document 5,420,067
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5420067

Method and apparatus for obtaining a precision thickness in semiconductor and other wafers
patent, July 2002

Okojie, Robert S.
US Patent Document 6,426,296
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6426296

Laser etching of semiconductors
patent, January 1996

Ghandour, Osman
US Patent Document 5,486,264
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5486264

Apparatus and method for fabricating arrays of atomic-scale contacts and gaps between electrodes and applications thereof
patent, May 2004

Tao, Nongjian; Boussaad, Salah
US Patent Document 6,737,286
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6737286

Process for monitoring ion-assisted processing procedures on wafers and an apparatus for carrying out the same
patent, June 1994

Friedhelm, Heinrich
US Patent Document 5,319,197
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5319197

Process for producing a structured mask
patent, March 1999

Vonach, Herbert; Chalupka, Alfred; Loschner, Hans
US Patent Document 5,876,880
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5876880