Ultra-hard low friction coating based on A1MgB.sub.14 for reduced wear of MEMS and other tribological components and system
Abstract
Performance and reliability of microelectromechanical system (MEMS) components enhanced dramatically through the incorporation of protective thin film coatings. Current-generation MEMS devices prepared by the LIGA technique employ transition metals such as Ni, Cu, Fe, or alloys thereof, and hence lack stability in oxidizing, corrosive, and/or high temperature environments. Fabrication of a superhard, self-lubricating coating based on a ternary boride compound AlMgB.sub.14 is described in this letter as a potential breakthrough in protective coating technology for LIGA microdevices. Nanoindentation tests show that hardness of AlMgB.sub.14 films prepared by pulsed laser deposition ranges from 45 GPa to 51 GPa, when deposited at room temperature and 573 K, respectively. Extremely low friction coefficients of 0.04-0.05, which are thought to result from a self-lubricating effect, have also been confirmed by nanoscratch tests on the AlMgB.sub.14 films. Transmission electron microscopy studies show that the as-deposited films are amorphous, regardless of substrate temperature; however, analysis of FTIR spectra suggests that the higher substrate temperature facilitates formation of the B.sub.12 icosahedral framework, therefore leading to the higher hardness.
- Inventors:
- Issue Date:
- Research Org.:
- Iowa State Univ. Research Foundation, Inc., Ames, IA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1531533
- Patent Number(s):
- 7238429
- Application Number:
- 10/946,051
- Assignee:
- Iowa State University Research Foundation, Inc. (Ames, IA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- DOE Contract Number:
- W-7405-ENG-82; NSF-DMI-0084969
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2004-09-21
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Cook, Bruce Allan, Tian, Yun, Harringa, Joel Lee, Constant, Alan Paul, Russell, Alan Mark, and Molian, Palaniappa A. Ultra-hard low friction coating based on A1MgB.sub.14 for reduced wear of MEMS and other tribological components and system. United States: N. p., 2007.
Web.
Cook, Bruce Allan, Tian, Yun, Harringa, Joel Lee, Constant, Alan Paul, Russell, Alan Mark, & Molian, Palaniappa A. Ultra-hard low friction coating based on A1MgB.sub.14 for reduced wear of MEMS and other tribological components and system. United States.
Cook, Bruce Allan, Tian, Yun, Harringa, Joel Lee, Constant, Alan Paul, Russell, Alan Mark, and Molian, Palaniappa A. Tue .
"Ultra-hard low friction coating based on A1MgB.sub.14 for reduced wear of MEMS and other tribological components and system". United States. https://www.osti.gov/servlets/purl/1531533.
@article{osti_1531533,
title = {Ultra-hard low friction coating based on A1MgB.sub.14 for reduced wear of MEMS and other tribological components and system},
author = {Cook, Bruce Allan and Tian, Yun and Harringa, Joel Lee and Constant, Alan Paul and Russell, Alan Mark and Molian, Palaniappa A.},
abstractNote = {Performance and reliability of microelectromechanical system (MEMS) components enhanced dramatically through the incorporation of protective thin film coatings. Current-generation MEMS devices prepared by the LIGA technique employ transition metals such as Ni, Cu, Fe, or alloys thereof, and hence lack stability in oxidizing, corrosive, and/or high temperature environments. Fabrication of a superhard, self-lubricating coating based on a ternary boride compound AlMgB.sub.14 is described in this letter as a potential breakthrough in protective coating technology for LIGA microdevices. Nanoindentation tests show that hardness of AlMgB.sub.14 films prepared by pulsed laser deposition ranges from 45 GPa to 51 GPa, when deposited at room temperature and 573 K, respectively. Extremely low friction coefficients of 0.04-0.05, which are thought to result from a self-lubricating effect, have also been confirmed by nanoscratch tests on the AlMgB.sub.14 films. Transmission electron microscopy studies show that the as-deposited films are amorphous, regardless of substrate temperature; however, analysis of FTIR spectra suggests that the higher substrate temperature facilitates formation of the B.sub.12 icosahedral framework, therefore leading to the higher hardness.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jul 03 00:00:00 EDT 2007},
month = {Tue Jul 03 00:00:00 EDT 2007}
}
Works referenced in this record:
Pulsed laser deposition of AlMgB14 on carbide inserts for metal cutting
journal, June 2002
- Cherukuri, Ram; Womack, Melissa; Molian, Pal
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Superabrasive boride and a method of preparing the same by mechanical alloying and hot pressing
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Superabrasive boride and a method of preparing the same by mechanical alloying and hot pressing
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Novel friction and wear-resistant coatings for tools, dies and microelectromechanical systems
patent-application, November 2003
- Molian, Palaniappa A.; Womack, Melissa
- US Patent Application 10/354722; 20030219605
Works referencing / citing this record:
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- Solovyeva, Lyudmila Mikhaylovna; Jansson, Kyle S.; Elmoursi, Alaa AbdelAzim
- US Patent Document 8,550,792
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- Zhu, Dong; Milner, Robert; Elmoursi, Alaa AbdelAzim
- US Patent Document 8,039,096
Inserts, polycrystalline diamond compact cutting elements, earth-boring bits comprising same, and methods of forming same
patent, April 2014
- DiGiovanni, Anthony A.
- US Patent Document 8,689,909
Bearing having components fabricated from a ceramic matrix composite
patent, October 2015
- Sears, James William; Ghanime, George Hanna; Fisher, Kenneth Lee
- US Patent Document 9,169,872