Quantitative secondary electron detection
Abstract
Quantitative Secondary Electron Detection (QSED) using the array of solid state devices (SSD) based electron-counters enable critical dimension metrology measurements in materials such as semiconductors, nanomaterials, and biological samples (FIG. 3). Methods and devices effect a quantitative detection of secondary electrons with the array of solid state detectors comprising a number of solid state detectors. An array senses the number of secondary electrons with a plurality of solid state detectors, counting the number of secondary electrons with a time to digital converter circuit in counter mode.
- Inventors:
- Issue Date:
- Research Org.:
- ScienceTomorrow LLC, Lexington, KY (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1440018
- Patent Number(s):
- 9966224
- Application Number:
- 14/918,560
- Assignee:
- ScienceTomorrow LLC (Lexington, KY)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- SC0009649
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2015 Oct 20
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Agrawal, Jyoti, Joy, David C., and Nayak, Subuhadarshi. Quantitative secondary electron detection. United States: N. p., 2018.
Web.
Agrawal, Jyoti, Joy, David C., & Nayak, Subuhadarshi. Quantitative secondary electron detection. United States.
Agrawal, Jyoti, Joy, David C., and Nayak, Subuhadarshi. Tue .
"Quantitative secondary electron detection". United States. https://www.osti.gov/servlets/purl/1440018.
@article{osti_1440018,
title = {Quantitative secondary electron detection},
author = {Agrawal, Jyoti and Joy, David C. and Nayak, Subuhadarshi},
abstractNote = {Quantitative Secondary Electron Detection (QSED) using the array of solid state devices (SSD) based electron-counters enable critical dimension metrology measurements in materials such as semiconductors, nanomaterials, and biological samples (FIG. 3). Methods and devices effect a quantitative detection of secondary electrons with the array of solid state detectors comprising a number of solid state detectors. An array senses the number of secondary electrons with a plurality of solid state detectors, counting the number of secondary electrons with a time to digital converter circuit in counter mode.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 08 00:00:00 EDT 2018},
month = {Tue May 08 00:00:00 EDT 2018}
}
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