Laser-induced gas plasma machining

Elhadj, Selim; Bass, Isaac Louis; Guss, Gabriel Mark; Matthews, Manyalibo J.

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A - human necessities
A01 - agriculture
A21 - baking
A22 - butchering
A23 - foods or foodstuffs
A24 - tobacco
A41 - wearing apparel
A42 - headwear
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A44 - haberdashery
A45 - hand or travelling articles
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A62 - life-saving
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A99 - subject matter not otherwise provided for in this section
B - performing operations
B01 - physical or chemical processes or apparatus in general
B02 - crushing, pulverising, or disintegrating
B03 - separation of solid materials using liquids or using pneumatic tables or jigs
B04 - centrifugal apparatus or machines for carrying-out physical or chemical processes
B05 - spraying or atomising in general
B06 - generating or transmitting mechanical vibrations in general
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B21 - mechanical metal-working without essentially removing material
B22 - casting
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B27 - working or preserving wood or similar material
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B62 - land vehicles for travelling otherwise than on rails
B63 - ships or other waterborne vessels
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B67 - opening, closing {or cleaning} bottles, jars or similar containers
B68 - saddlery
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C01 - inorganic chemistry
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D06 - treatment of textiles or the like
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Title: Laser-induced gas plasma machining

Abstract

Techniques for removing material from a substrate are provided. A laser beam is focused at a distance from the surface to be treated. A gas is provided at the focus point. The gas is dissociated using the laser energy to generate gas plasma. The substrate is then brought in contact with the gas plasma to enable material removal.

Inventors:: Elhadj, Selim; Bass, Isaac Louis; Guss, Gabriel Mark; Matthews, Manyalibo J.

Issue Date:: Tue Oct 17 00:00:00 EDT 2017

Research Org.:: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1400251

Patent Number(s):: 9790090

Application Number:: 13/797,495

Assignee:: Lawrence Livermore National Security, LLC

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23K - SOLDERING OR UNSOLDERING

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS

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B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23K - SOLDERING OR UNSOLDERING
B23K26/1462 - {Nozzles
B23K26/352 - for surface treatment
B23K26/361 - for deburring or mechanical trimming

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
B81C1/00523 - {Etching material}

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/32449 - {Gas control, e.g. control of the gas flow}

H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05H - PLASMA TECHNIQUE
H05H1/46 - using applied electromagnetic fields, e.g. high frequency or microwave energy

Show less

DOE Contract Number:: AC52-07NA27344

Resource Type:: Patent

Resource Relation:: Patent File Date: 2013 Mar 12

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Elhadj, Selim, Bass, Isaac Louis, Guss, Gabriel Mark, and Matthews, Manyalibo J. Laser-induced gas plasma machining.  United States: N. p., 2017. 
        Web.

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                    Elhadj, Selim, Bass, Isaac Louis, Guss, Gabriel Mark, & Matthews, Manyalibo J. Laser-induced gas plasma machining.  United States.

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                    Elhadj, Selim, Bass, Isaac Louis, Guss, Gabriel Mark, and Matthews, Manyalibo J. Tue .  
        "Laser-induced gas plasma machining".  United States.  https://www.osti.gov/servlets/purl/1400251.

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@article{osti_1400251,

  title        = {Laser-induced gas plasma machining},

  author       = {Elhadj, Selim and Bass, Isaac Louis and Guss, Gabriel Mark and Matthews, Manyalibo J.},

  abstractNote = {Techniques for removing material from a substrate are provided. A laser beam is focused at a distance from the surface to be treated. A gas is provided at the focus point. The gas is dissociated using the laser energy to generate gas plasma. The substrate is then brought in contact with the gas plasma to enable material removal.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Oct 17 00:00:00 EDT 2017},

  month        = {Tue Oct 17 00:00:00 EDT 2017}

}

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Works referenced in this record:

Thin film deposition using plasma-generated source gas
patent, March 1985

Jelks, Edward C.
US Patent Document 4,505,949
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4505949

Axial flow laser plasma spraying
patent, August 1991

Whitney, Eric J.; Pratt, Vanon D.; Scheidt, Wilbur Douglas
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Method for fabricating laser generated I.C. masks
patent, April 1992

Dooley, Daniel J.; Elsea, Jr., Arthur R.
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Enhanced laser beam welding
patent, February 1999

Walduck, Robert Philip
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Method and process gas for laser welding metal workpieces
patent, August 2001

Faerber, Mark
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Method and apparatus for laser welding with plasma suppression
patent, July 2007

Burt, Paul; Griffith, Anthony J.; Green, Andrew P.
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Dry surface cleaning apparatus using a laser
patent-application, November 2002

Lee, Jong-Myong; Cho, Sung Ho
US Patent Document 10/094610; 20020170892
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Laser beam irradiating apparatus, laser beam irradiating method, and method of manufacturing a semiconductor device
patent-application, June 2003

Tanaka, Koichiro
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Laser micromachining and methods and systems of same
patent-application, August 2003

Huth, Mark C.; Pollard, Jeffrey R.; Scott, Graeme
US Patent Document 10/076467; 20030155328
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Plasma etching method
patent-application, July 2004

Li, Jen-Che; Lin, Jung-Te
US Patent Document 10/419796; 20040124176
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Process monitor for laser and plasma materials processing of materials
patent-application, September 2004

Connally, William J.; Woods, Kenneth J.
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Hybrid laser-arc welding method with gas flow rate adjustment
patent-application, January 2005

Matile, Olivier; Chouf, Karim; Leferbve, Philippe
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Method and laser system for production of laser-induced images inside and on the surface of transparent material
patent-application, December 2005

Burrowes, Dirk; Troitski, Igor
US Patent Document 10/862869; 20050269301
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Method of forming substrate for fluid ejection device
patent-application, March 2006

Mulloy, Michael; Scott, Graeme
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Method for cutting substrate using femtosecond laser
patent-application, May 2006

Park, Jeong Kweon
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patent-application, March 2007

Kleine, Klaus; Palley, Scott; Korte, Frank
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patent-application, March 2007

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Arrangement and method for the on-line monitoring of the quality of a laser process exerted on a workpiece
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Method and Apparatus for Cleaning a Substrate
patent-application, April 2009

Lee, Se-Won
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Method and Apparatus for Laser Ablation
patent-application, September 2012

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Similar Records

Title: Laser-induced gas plasma machining

Abstract

Citation Formats

Thin film deposition using plasma-generated source gas patent, March 1985

Axial flow laser plasma spraying patent, August 1991

Method for fabricating laser generated I.C. masks patent, April 1992

Enhanced laser beam welding patent, February 1999

Method and process gas for laser welding metal workpieces patent, August 2001

Method and apparatus for laser welding with plasma suppression patent, July 2007

Dry surface cleaning apparatus using a laser patent-application, November 2002

Laser beam irradiating apparatus, laser beam irradiating method, and method of manufacturing a semiconductor device patent-application, June 2003

Laser micromachining and methods and systems of same patent-application, August 2003

Plasma etching method patent-application, July 2004

Process monitor for laser and plasma materials processing of materials patent-application, September 2004

Hybrid laser-arc welding method with gas flow rate adjustment patent-application, January 2005

Method and laser system for production of laser-induced images inside and on the surface of transparent material patent-application, December 2005

Method of forming substrate for fluid ejection device patent-application, March 2006

Method for cutting substrate using femtosecond laser patent-application, May 2006

Laser induced plasma machining with a process gas patent-application, March 2007

Laser induced plasma machining with an optimized process gas patent-application, March 2007

Arrangement and method for the on-line monitoring of the quality of a laser process exerted on a workpiece patent-application, February 2009

Method and Apparatus for Cleaning a Substrate patent-application, April 2009

Method and Apparatus for Laser Ablation patent-application, September 2012

Thin film deposition using plasma-generated source gas
patent, March 1985

Axial flow laser plasma spraying
patent, August 1991

Method for fabricating laser generated I.C. masks
patent, April 1992

Enhanced laser beam welding
patent, February 1999

Method and process gas for laser welding metal workpieces
patent, August 2001

Method and apparatus for laser welding with plasma suppression
patent, July 2007

Dry surface cleaning apparatus using a laser
patent-application, November 2002

Laser beam irradiating apparatus, laser beam irradiating method, and method of manufacturing a semiconductor device
patent-application, June 2003

Laser micromachining and methods and systems of same
patent-application, August 2003

Plasma etching method
patent-application, July 2004

Process monitor for laser and plasma materials processing of materials
patent-application, September 2004

Hybrid laser-arc welding method with gas flow rate adjustment
patent-application, January 2005

Method and laser system for production of laser-induced images inside and on the surface of transparent material
patent-application, December 2005

Method of forming substrate for fluid ejection device
patent-application, March 2006

Method for cutting substrate using femtosecond laser
patent-application, May 2006

Laser induced plasma machining with a process gas
patent-application, March 2007

Laser induced plasma machining with an optimized process gas
patent-application, March 2007

Arrangement and method for the on-line monitoring of the quality of a laser process exerted on a workpiece
patent-application, February 2009

Method and Apparatus for Cleaning a Substrate
patent-application, April 2009

Method and Apparatus for Laser Ablation
patent-application, September 2012