Transparent nanocrystalline diamond coatings and devices
Abstract
A method for coating a substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The plasma ball has a diameter. The plasma ball is disposed at a first distance from the substrate and the substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the substrate, and a diamond coating is deposited on the substrate. The diamond coating has a thickness. Furthermore, the diamond coating has an optical transparency of greater than about 80%. The diamond coating can include nanocrystalline diamond. The microwave plasma source can have a frequency of about 915 MHz.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1375938
- Patent Number(s):
- 9741561
- Application Number:
- 14/796,527
- Assignee:
- UCHICAGO ARGONNE, LLC
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC02-06CH11357
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2015 Jul 10
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 70 PLASMA PHYSICS AND FUSION TECHNOLOGY
Citation Formats
Sumant, Anirudha V., and Khan, Adam. Transparent nanocrystalline diamond coatings and devices. United States: N. p., 2017.
Web.
Sumant, Anirudha V., & Khan, Adam. Transparent nanocrystalline diamond coatings and devices. United States.
Sumant, Anirudha V., and Khan, Adam. Tue .
"Transparent nanocrystalline diamond coatings and devices". United States. https://www.osti.gov/servlets/purl/1375938.
@article{osti_1375938,
title = {Transparent nanocrystalline diamond coatings and devices},
author = {Sumant, Anirudha V. and Khan, Adam},
abstractNote = {A method for coating a substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The plasma ball has a diameter. The plasma ball is disposed at a first distance from the substrate and the substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the substrate, and a diamond coating is deposited on the substrate. The diamond coating has a thickness. Furthermore, the diamond coating has an optical transparency of greater than about 80%. The diamond coating can include nanocrystalline diamond. The microwave plasma source can have a frequency of about 915 MHz.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Aug 22 00:00:00 EDT 2017},
month = {Tue Aug 22 00:00:00 EDT 2017}
}
Works referenced in this record:
Method of manufacturing diamond thermistors
patent, February 1993
- Yamazaki, Shunpei
- US Patent Document 5,183,530
Passivation/patterning of PZR diamond films for high temperature operability
patent, April 1997
- Kurtz, Anthony D.; Ned, Alexander A.; Vergel de Dios, Timoteo I.
- US Patent Document 5,622,902
X-ray beam position monitor and its position measurement method
patent, February 1998
- Kitamura, Hideo; Yamamoto, Yoshiyuki; Tanabe, Keiichiro
- US Patent Document 5,717,214
Method for synthesizing n-type diamond having low resistance
patent, January 2002
- Yoshida, Hiroshi
- US Patent Document 6,340,393
Electrical switching device and method of embedding catalytic material in a diamond substrate
patent, August 2010
- Taylor, Gareth Andrew
- US Patent Document 7,781,257
Ultrananocrystalline diamond films with optimized dielectric properties for advanced RF MEMS capacitive switches
patent, January 2013
- Sumant, Anirudha V.; Auciello, Orlando H.; Mancini, Derrick C.
- US Patent Document 8,354,290
Nano-crystal diamond film, manufacturing method thereof, and device using nano-crystal diamond film
patent, April 2013
- Gamo, Hidenori; Ando, Toshihiro
- US Patent Document 8,420,043
Diamond transmission dynode and photomultiplier or imaging device using same
patent-application, April 2002
- Tomasetti, Charles M.; Caracciolo, Robert; Beetz, Charles B.
- US Patent Application 09/885716; 20020041154
Polycrystal diamond thin film and photocathode and electron tube using the same
patent-application, January 2003
- Niigaki, Minoru; Uchiyama, Shoichi; Kan, Hirofumi
- US Patent Application 10/223378; 20030001498
Patterning Of Nanocrystalline Diamond Films For Diamond Microstructures Useful In Mems And Other Devices
patent-application, July 2004
- Gruen, Dieter M.; Busmann, Hans-Gerd; Meyer, Eva-Maria
- US Patent Application 10/169879; 20040129202
Single crystal diamond prepared by CVD
patent-application, November 2004
- Scarsbrook, Geoffrey Alan; Martineau, Philip Maurice; Collins, John Lloyd
- US Patent Application 10/777633; 20040221795
All diamond self-aligned thin film transistor
patent-application, March 2006
- Gerbi, Jennifer
- US Patent Document 11/226703; 20060060864
Transparent thin film transistor (TFT) and its method of manufacture
patent-application, March 2007
- Jeong, Jae Kyeong; Shin, Hyun Soo; Mo, Yeon Gon
- US Patent Application 11/513090; 20070057261
Diamond Semiconductor Element And Process For Producing The Same
patent-application, June 2008
- Kasu, Makoto; Makimoto, Toshiki; Ueda, Kenji
- US Patent Application 12/023660; 20080134960
Nanowire-based sensor configurations
patent-application, May 2009
- Hamilton, James M.; Dubrow, Robert S.; Chow, Calvin Y.H.
- US Patent Application 11/399218; 20090124025
Process and apparatus for diamond synthesis
patent-application, September 2009
- Asmussen, Jes; Grotjohn, Timothy; Reinhard, Donnie
- US Patent Application 12/381270; 20090239078
Printable, Flexible and Stretchable Diamond for Thermal Management
patent-application, March 2010
- Rogers, John A.; Kim, Tae Ho; Choi, Won Mook
- US Patent Application 12/418071; 20100052112
Apparatus And Method For Diamond Film Growth
patent-application, July 2010
- D'Evelyn, Mark Philip; Blouch, John Dewey; Haber, Ludwig Christian
- US Patent Application 12/359083; 20100189924
Semiconductor Component Having Diamond-Containing Electrodes and Use Thereof
patent-application, December 2012
- Kusterer, Joachim; Kohn, Erhard
- US Patent Document 13/384070; 20120312353
Diamond Semiconductor System and Method
patent-application, January 2013
- Khan, Adam
- US Patent Application 13/273467; 20130026492
Graphene on Semiconductor Detector
patent-application, April 2013
- Kub, Francis J.; Anderson, Travis; Hobart, Karl D.
- US Patent Application 13/630257; 20130082241
Nanowire Stress Sensors And Stress Sensor Integrated Circuits, Design Structures For A Stress Sensor Integrated Circuit, And Related Methods
patent-application, June 2013
- Bryant, Andres; Gunawan, Oki; Lo, Shih-Hsien
- US Patent Application 13/764169; 20130145857
Vacuum Encapsulated, High Temperature Diamond Amplified Cathode Capsule and Method for Making Same
patent-application, December 2013
- Rao, Triveni; Walsh, John; Gangone, Elizabeth
- US Patent Application 13/896459; 20130320295
Appendage Mountable Electronic Devices COnformable to Surfaces
patent-application, December 2013
- Rogers, John A.; Ying, Ming; Bonifas, Andrew
- US Patent Application 13/853770; 20130333094
X-Ray Monitoring Optical Elements
patent-application, April 2015
- Stoupin, Stanislav; Shvydko, Yury; Katsoudas, John
- US Patent Application 14/041831; 20150092925
Design and fabrication of piezoresistive strain gauges based on nanocrystalline diamond layers
journal, January 2012
- Kulha, Pavel; Babchenko, Oleg; Kromka, Alexander
- Vacuum, Vol. 86, Issue 6, p. 689-692
Piezoresistivity of polycrystalline p-type diamond films of various doping levels at different temperatures
journal, July 1997
- Wang, W. L.; Jiang, X.; Taube, K.
- Journal of Applied Physics, Vol. 82, Issue 2, p. 729-732
Piezoresistivity in vapor‐deposited diamond films
journal, June 1992
- Aslam, M.; Taher, I.; Masood, A.
- Applied Physics Letters, Vol. 60, Issue 23, p. 2923-2925
Are Diamonds a MEMS' Best Friend?
journal, December 2007
- Auciello, Orlando; Pacheco, Sergio; Sumant, Anirudha
- IEEE Microwave Magazine, Vol. 8, Issue 6, p. 61-75
The CVD of Nanodiamond Materials
journal, July 2008
- Butler, James E.; Sumant, Anirudha V.; Barnard, Amanda S.
- Chemical Vapor Deposition, Vol. 14, Issue 7-8, p. 145-160
Band structure, deformation potentials, and carrier mobility in strained Si, Ge, and SiGe alloys
journal, August 1996
- Fischetti, M. V.; Laux, S. E.
- Journal of Applied Physics, Vol. 80, Issue 4, p. 2234-2252
Electrical contacts to ultrananocrystalline diamond
journal, September 2003
- Gerbi, J. E.; Auciello, O.; Birrell, J.
- Applied Physics Letters, Vol. 83, Issue 10, p. 2001-2003
Configurational, electronic entropies and the thermoelectric properties of nanocarbon ensembles
journal, April 2008
- Gruen, Dieter M.; Bruno, Paola; Xie, Ming
- Applied Physics Letters, Vol. 92, Issue 14, Article No. 143118
Giant piezoresistance effect in silicon nanowires
journal, October 2006
- He, Rongrui; Yang, Peidong
- Nature Nanotechnology, Vol. 1, Issue 1, p. 42-46
Silicon Device Scaling to the Sub-10-nm Regime
journal, December 2004
- Ieong, Meikei; Doris, Bruce; Kedzierski, Jakub
- Science, Vol. 306, Issue 5704, p. 2057-2060
Review on diamond based piezoresistive sensors
conference, January 1998
- Werner, M.; Gluche, P.; Adamschik, M.
Planar ultrananocrystalline diamond field emitter in accelerator radio frequency electron injector: Performance metrics
journal, November 2014
- Baryshev, Sergey V.; Antipov, Sergey; Shao, Jiahang
- Applied Physics Letters, Vol. 105, Issue 20, Article No. 203505
Optically Transparent Diamond Electrode for Use in IR Transmission Spectroelectrochemical Measurements
journal, October 2007
- Dai, Yingrui; Proshlyakov, Denis A.; Zak, Jerzy K.
- Analytical Chemistry, Vol. 79, Issue 19, p. 7526-7533
Direct Low-Temperature Integration of Nanocrystalline Diamond with GaN Substrates for Improved Thermal Management of High-Power Electronics
journal, February 2012
- Goyal, Vivek; Sumant, Anirudha V.; Teweldebrhan, Desalegne
- Advanced Functional Materials, Vol. 22, Issue 7, p. 1525-1530
High quantum efficiency ultrananocrystalline diamond photocathode for photoinjector applications
journal, September 2014
- Pérez Quintero, Kenneth J.; Antipov, Sergey; Sumant, Anirudha V.
- Applied Physics Letters, Vol. 105, Issue 12, Article No. 123103
Properties of Hydrogen Terminated Diamond as a Photocathode
journal, March 2011
- Rameau, J. D.; Smedley, J.; Muller, E. M.
- Physical Review Letters, Vol. 106, Issue 13, Article No. 137602
Optical and Electrochemical Properties of Optically Transparent, Boron-Doped Diamond Thin Films Deposited on Quartz
journal, December 2002
- Stotter, Jason; Zak, Jerzy; Behler, Zack
- Analytical Chemistry, Vol. 74, Issue 23, p. 5924-5930
Polycrystalline diamond films as prospective UV photocathodes
conference, December 2000
- Tremsin, Anton S.; Siegmund, Oswald H. W.
- Instrumentation for UV/EUV Astronomy and Solar Missions