Integrated Avalanche Photodiode arrays

Harmon, Eric S.

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Title: Integrated Avalanche Photodiode arrays

Abstract

The present disclosure includes devices for detecting photons, including avalanche photon detectors, arrays of such detectors, and circuits including such arrays. In some aspects, the detectors and arrays include a virtual beveled edge mesa structure surrounded by resistive material damaged by ion implantation and having side wall profiles that taper inwardly towards the top of the mesa structures, or towards the direction from which the ion implantation occurred. Other aspects are directed to masking and multiple implantation and/or annealing steps. Furthermore, methods for fabricating and using such devices, circuits and arrays are disclosed.

Inventors:: Harmon, Eric S.

Issue Date:: Tue Apr 18 00:00:00 EDT 2017

Research Org.:: LightSpin Technologies, Inc. Endicott, NY (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1351819

Patent Number(s):: 9627569

Application Number:: 14/718,352

Assignee:: LightSpin Technologies, Inc.

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L27/1446 - {in a repetitive configuration}
H01L27/14609 - {Pixel-elements with integrated switching, control, storage or amplification elements
H01L27/14643 - {Photodiode arrays
H01L27/14683 - {Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
H01L31/0352 - characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
H01L31/107 - the potential barrier working in avalanche mode, e.g. avalanche photodiode
H01L31/1844 - {comprising ternary or quaternary compounds, e.g. Ga Al As, In Ga As P}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
Y02E10/544 - Solar cells from Group III-V materials

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02P - CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
Y02P70/50 - Manufacturing or production processes characterised by the final manufactured product

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DOE Contract Number:: SC0009538

Resource Type:: Patent

Resource Relation:: Patent File Date: 2015 May 21

Country of Publication:: United States

Language:: English

Subject:: 47 OTHER INSTRUMENTATION; 36 MATERIALS SCIENCE

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                    Harmon, Eric S. Integrated Avalanche Photodiode arrays.  United States: N. p., 2017. 
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                    Harmon, Eric S. Integrated Avalanche Photodiode arrays.  United States.

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                    Harmon, Eric S. Tue .  
        "Integrated Avalanche Photodiode arrays".  United States.  https://www.osti.gov/servlets/purl/1351819.

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@article{osti_1351819,

  title        = {Integrated Avalanche Photodiode arrays},

  author       = {Harmon, Eric S.},

  abstractNote = {The present disclosure includes devices for detecting photons, including avalanche photon detectors, arrays of such detectors, and circuits including such arrays. In some aspects, the detectors and arrays include a virtual beveled edge mesa structure surrounded by resistive material damaged by ion implantation and having side wall profiles that taper inwardly towards the top of the mesa structures, or towards the direction from which the ion implantation occurred. Other aspects are directed to masking and multiple implantation and/or annealing steps. Furthermore, methods for fabricating and using such devices, circuits and arrays are disclosed.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Apr 18 00:00:00 EDT 2017},

  month        = {Tue Apr 18 00:00:00 EDT 2017}

}

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