Microstructured silicon radiation detector
Abstract
A radiation detector comprises a silicon body in which are defined vertical pores filled with a converter material and situated within silicon depletion regions. One or more charge-collection electrodes are arranged to collect current generated when secondary particles enter the silicon body through walls of the pores. The pores are disposed in low-density clusters, have a majority pore thickness of 5 .mu.m or less, and have a majority aspect ratio, defined as the ratio of pore depth to pore thickness, of at least 10.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1346947
- Patent Number(s):
- 9595628
- Application Number:
- 14/456,934
- Assignee:
- Sandia Corporation
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2014 Aug 11
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 36 MATERIALS SCIENCE
Citation Formats
Okandan, Murat, Derzon, Mark S., and Draper, Bruce L. Microstructured silicon radiation detector. United States: N. p., 2017.
Web.
Okandan, Murat, Derzon, Mark S., & Draper, Bruce L. Microstructured silicon radiation detector. United States.
Okandan, Murat, Derzon, Mark S., and Draper, Bruce L. Tue .
"Microstructured silicon radiation detector". United States. https://www.osti.gov/servlets/purl/1346947.
@article{osti_1346947,
title = {Microstructured silicon radiation detector},
author = {Okandan, Murat and Derzon, Mark S. and Draper, Bruce L.},
abstractNote = {A radiation detector comprises a silicon body in which are defined vertical pores filled with a converter material and situated within silicon depletion regions. One or more charge-collection electrodes are arranged to collect current generated when secondary particles enter the silicon body through walls of the pores. The pores are disposed in low-density clusters, have a majority pore thickness of 5 .mu.m or less, and have a majority aspect ratio, defined as the ratio of pore depth to pore thickness, of at least 10.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 14 00:00:00 EDT 2017},
month = {Tue Mar 14 00:00:00 EDT 2017}
}
Works referenced in this record:
Coated semiconductor devices for neutron detection
patent, November 2002
- Klann, Raymond; McGregor, Douglas S.
- US Patent Document 6,479,826
Method and system for determining depth distribution of radiation-emitting material located in a source medium and radiation detector system for use therein
patent, March 2003
- Benke, Roland Richard Vincent; Kearfott, Kimberlee J.; McGregor, Douglas S.
- US Patent Document 6,528,797
Pocked surface neutron detector
patent, April 2003
- McGregor, Douglas S.; Klann, Raymond
- US Patent Document 6,545,281
Method and system for determining depth distribution of radiation-emitting material located in a source medium and radiation detector system for use therein
patent, April 2004
- Benke, Roland Richard Vincent; Kearfott, Kimberlee J.; McGregor, Douglas S.
- US Patent Document 6,727,505
Collimated radiation detector assembly, array of collimated radiation detectors and collimated radiation detector module
patent, August 2004
- McGregor, Douglas S.
- US Patent Document 6,781,132
Method and system for detecting ionizing radiation
patent, October 2004
- McGregor, Douglas S.; Kearfott, Kimberlee J.
- US Patent Document 6,806,474
Method and system for measuring neutron emissions and ionizing radiation, solid state detector for use therein, and imaging system and array of such detectors for use therein
patent, July 2005
- McGregor, Douglas S.
- US Patent Document 6,921,903
High-efficiency neutron detectors and methods of making same
patent, January 2007
- McGregor, Douglas S.; Klann, Raymond
- US Patent Document 7,164,138
Non-streaming high-efficiency perforated semiconductor neutron detectors, methods of making same and measuring wand and detector modules utilizing same
patent, December 2010
- McGregor, Douglas S.; Shultis, John K.; Rice, Blake
- US Patent Document 7,855,372
Characteristics of 3D Micro-Structured Semiconductor High Efficiency Neutron Detectors
journal, June 2009
- Bellinger, S. L.; McNeil, W. J.; Unruh, T. C.
- IEEE Transactions on Nuclear Science, Vol. 56, Issue 3
Characteristics of the stacked microstructured solid state neutron detector
conference, August 2010
- Bellinger, S. L.; Fronk, R. G.; McNeil, W. J.
- SPIE Optical Engineering + Applications 2010, Vol. 7805, Article No. 78050N
Enhanced variant designs and characteristics of the microstructured solid-state neutron detector
journal, October 2011
- Bellinger, S. L.; Fronk, R. G.; McNeil, W. J.
- Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 652, Issue 1
High efficiency dual-integrated stacked microstructured solid-state neutron detectors
conference, October 2010
- Bellinger, S. L.; Fronk, R. G.; McNeil, W. J.
- IEEE Nuclear Science Symposuim & Medical Imaging Conference
Improved Fabrication Technique for Microstructured Solid-State Neutron Detectors
journal, January 2009
- Bellinger, Steven L.; McNeil, Walter J.; McGregor, Douglas Scott
- MRS Proceedings, Vol. 1164
Improved High Efficiency Stacked Microstructured Neutron Detectors Backfilled With Nanoparticle $^{6}$LiF
journal, February 2012
- Bellinger, S. L.; Fronk, R. G.; McNeil, W. J.
- IEEE Transactions on Nuclear Science, Vol. 59, Issue 1
Variant designs and characteristics of improved microstructured solid-state neutron detectors
conference, October 2009
- Bellinger, S. L.; McNeil, W. J.; McGregor, D. S.
- 2009 IEEE Nuclear Science Symposium Conference Record (NSS/MIC)
Characterization of prototype perforated semiconductor neutron detectors
journal, February 2010
- Henderson, C. M.; Jahan, Q. M.; Dunn, W. L.
- Radiation Physics and Chemistry, Vol. 79, Issue 2
Neutron dosimeters employing high-efficiency perforated semiconductor detectors
journal, October 2007
- Jahan, Q.; Patterson, E.; Rice, B.
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 263, Issue 1
Formation Mechanism and Properties of Electrochemically Etched Trenches in n-Type Silicon
journal, January 1990
- Lehmann, V.; Föll, H.
- Journal of The Electrochemical Society, Vol. 137, Issue 2, p. 653-659
The Physics of Macropore Formation in Low Doped n-Type Silicon
journal, January 1993
- Lehmann, V.
- Journal of The Electrochemical Society, Vol. 140, Issue 10, p. 2836-2843
Design considerations for thin film coated semiconductor thermal neutron detectors—I: basics regarding alpha particle emitting neutron reactive films
journal, March 2003
- McGregor, D. S.; Hammig, M. D.; Yang, Y.-H.
- Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 500, Issue 1-3, p. 272-308
Micro-structured high-efficiency semiconductor neutron detectors
conference, October 2008
- McGregor, D. S.; Bellinger, S. L.; McNeil, W. J.
Microstructured semiconductor neutron detectors
journal, September 2009
- McGregor, D. S.; McNeil, W. J.; Bellinger, S. L.
- Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 608, Issue 1
Perforated diode neutron detector modules fabricated from high-purity silicon
journal, October 2009
- McGregor, D. S.; Bellinger, S. L.; Bruno, D.
- Radiation Physics and Chemistry, Vol. 78, Issue 10
New surface morphology for low stress thin-film-coated thermal neutron detectors
journal, August 2002
- McGregor, D. S.; Klann, R. T.; Gersch, H. K.
- IEEE Transactions on Nuclear Science, Vol. 49, Issue 4, p. 1999-2004
Present status of microstructured semiconductor neutron detectors
journal, September 2013
- McGregor, Douglas S.; Bellinger, Steven L.; Shultis, J. Kenneth
- Journal of Crystal Growth, Vol. 379
Recent results from thin-film-coated semiconductor neutron detectors
conference, January 2003
- McGregor, Douglas S.; Klann, Raymond T.; Sanders, Jeffrey D.
- International Symposium on Optical Science and Technology, Vol. 4784
Reporting detection efficiency for semiconductor neutron detectors: A need for a standard
journal, March 2011
- McGregor, Douglas S.; Kenneth Shultis, J.
- Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 632, Issue 1
1-D array of perforated diode neutron detectors
journal, June 2009
- McNeil, Walter J.; Bellinger, Steven L.; Unruh, Troy C.
- Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 604, Issue 1-2
Perforated Diode Fabrication for Neutron Detection
conference, October 2006
- McNeil, W. J.; Bellinger, S. L.; Unruh, T. C.
- 2006 IEEE Nuclear Science Symposium Conference Record
Structuring of Macroporous Silicon for Applications as Photonic Crystals
journal, January 2000
- Müller, F.; Birner, A.; Gösele, U.
- Journal of Porous Materials, Vol. 7, Issue 1/3, p. 201-204
Gamma discrimination in pillar structured thermal neutron detectors
conference, May 2012
- Shao, Q.; Radev, R. P.; Conway, A. M.
- SPIE Defense, Security, and Sensing, Vol. 8358, Article No. 83581N
Design and performance considerations for perforated semiconductor thermal-neutron detectors
journal, July 2009
- Shultis, J. K.; McGregor, D. S.
- Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 606, Issue 3
Designs for micro-structured semiconductor neutron detectors
conference, September 2008
- Shultis, J. Kenneth; McGregor, Douglas S.; Burger, Arnold
Reduced efficiency variation in perforated neutron detectors with sinusoidal trench design
journal, June 2010
- Solomon, C. J.; Shultis, J. K.; McGregor, D. S.
- Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 618, Issue 1-3
Design and operation of a 2-D thin-film semiconductor neutron detector array for use as a beamport monitor
journal, June 2009
- Unruh, Troy C.; Bellinger, Steven L.; Huddleston, David E.
- Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 604, Issue 1-2