Lithographically defined microporous carbon-composite structures
Abstract
A microporous carbon scaffold is produced by lithographically patterning a carbon-containing photoresist, followed by pyrolysis of the developed resist structure. Prior to exposure, the photoresist is loaded with a nanoparticulate material. After pyrolysis, the nanonparticulate material is dispersed in, and intimately mixed with, the carbonaceous material of the scaffold, thereby yielding a carbon composite structure.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1334643
- Patent Number(s):
- 9513554
- Application Number:
- 14/749,328
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2015 Jun 24
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Burckel, David Bruce, Washburn, Cody M., Lambert, Timothy N., Finnegan, Patrick Sean, and Wheeler, David R. Lithographically defined microporous carbon-composite structures. United States: N. p., 2016.
Web.
Burckel, David Bruce, Washburn, Cody M., Lambert, Timothy N., Finnegan, Patrick Sean, & Wheeler, David R. Lithographically defined microporous carbon-composite structures. United States.
Burckel, David Bruce, Washburn, Cody M., Lambert, Timothy N., Finnegan, Patrick Sean, and Wheeler, David R. Tue .
"Lithographically defined microporous carbon-composite structures". United States. https://www.osti.gov/servlets/purl/1334643.
@article{osti_1334643,
title = {Lithographically defined microporous carbon-composite structures},
author = {Burckel, David Bruce and Washburn, Cody M. and Lambert, Timothy N. and Finnegan, Patrick Sean and Wheeler, David R.},
abstractNote = {A microporous carbon scaffold is produced by lithographically patterning a carbon-containing photoresist, followed by pyrolysis of the developed resist structure. Prior to exposure, the photoresist is loaded with a nanoparticulate material. After pyrolysis, the nanonparticulate material is dispersed in, and intimately mixed with, the carbonaceous material of the scaffold, thereby yielding a carbon composite structure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Dec 06 00:00:00 EST 2016},
month = {Tue Dec 06 00:00:00 EST 2016}
}
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Works referenced in this record:
Planar inorganic device
patent, June 2007
- Leatherdale, Catherine A.; Schardt, Craig R.; Thompson, D. Scott
- US Patent Document 7,232,650
Lithographically defined microporous carbon structures
patent, January 2013
- Burckel, David Bruce; Washburn, Cody M.; Polsky, Ronen
- US Patent Document 8,349,547
Tunable Young's Modulus in Carbon MEMS Using Graphene-Based Stiffeners
journal, March 2013
- Washburn, C. M.; Lambert, T. N.; Blecke, J.
- ECS Transactions, Vol. 50, Issue 12