Title: Oriented bottom-up growth of armchair graphene nanoribbons on germanium

Abstract

Graphene nanoribbon arrays, methods of growing graphene nanoribbon arrays and electronic and photonic devices incorporating the graphene nanoribbon arrays are provided. The graphene nanoribbons in the arrays are formed using a scalable, bottom-up, chemical vapor deposition (CVD) technique in which the (001) facet of the germanium is used to orient the graphene nanoribbon crystals along the [110] directions of the germanium.

Inventors:

Arnold, Michael Scott; Jacobberger, Robert Michael

Issue Date:

Tue Mar 15 00:00:00 EDT 2016

Research Org.:

Wisconsin Alumni Research Foundation, Madison, WI (United States)

Sponsoring Org.:

USDOE

OSTI Identifier:

1243035

Patent Number(s):

9287359

Application Number:

14/486,149

Assignee:

Wisconsin Alumni Research Foundation (Madison, WI)

Patent Classifications (CPCs):

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

H01L21/02381 - {Silicon, silicon germanium, germanium}
H01L21/02433 - {Crystal orientation}
H01L21/02527 - {Carbon, e.g. diamond-like carbon}
H01L21/02603 - {Nanowires}
H01L21/02609 - {Crystal orientation}
H01L21/0262 - {Reduction or decomposition of gaseous compounds, e.g. CVD}
H01L21/02658 - {Pretreatments
H01L29/045 - {by their particular orientation of crystalline planes}
H01L29/0673 - {oriented parallel to a substrate}
H01L29/1606 - {Graphene}

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DOE Contract Number:  

SC0006414

Resource Type:

Patent

Resource Relation:

Patent File Date: 2014 Sep 15

Country of Publication:

United States

Language:

English

Subject:

36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY