Growth of multi-component alloy films with controlled graded chemical composition on sub-nanometer scale
Abstract
The chemical composition of thin films is modulated during their growth. A computer code has been developed to design specific processes for producing a desired chemical composition for various deposition geometries. Good agreement between theoretical and experimental results was achieved.
- Inventors:
- Issue Date:
- Research Org.:
- EUV Limited Liability Corporation, Santa Clara, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1175275
- Patent Number(s):
- 6867149
- Application Number:
- 10/256,324
- Assignee:
- EUV Limited Liability Corporation (Santa Clara, CA)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Bajt, Sasa, and Vernon, Stephen P. Growth of multi-component alloy films with controlled graded chemical composition on sub-nanometer scale. United States: N. p., 2005.
Web.
Bajt, Sasa, & Vernon, Stephen P. Growth of multi-component alloy films with controlled graded chemical composition on sub-nanometer scale. United States.
Bajt, Sasa, and Vernon, Stephen P. Tue .
"Growth of multi-component alloy films with controlled graded chemical composition on sub-nanometer scale". United States. https://www.osti.gov/servlets/purl/1175275.
@article{osti_1175275,
title = {Growth of multi-component alloy films with controlled graded chemical composition on sub-nanometer scale},
author = {Bajt, Sasa and Vernon, Stephen P.},
abstractNote = {The chemical composition of thin films is modulated during their growth. A computer code has been developed to design specific processes for producing a desired chemical composition for various deposition geometries. Good agreement between theoretical and experimental results was achieved.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 15 00:00:00 EST 2005},
month = {Tue Mar 15 00:00:00 EST 2005}
}
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